Micro-electromechanical Systems (MEMS) and Nano-electromechanical Systems (NEMS) Technologies for Temperature Sensitive Semiconductors and Smart Materials

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The development of a generic MEMS/NEMS technology will place Australia at the forefront of MEMS science and technology and will form a platform for new and innovative products using new science developed from the capabilities to be established in this project. This project and the results it will generate will have significant impact in developing technologies that can transform Australian industry in biomedical and agricultural instrumentation and will be key to future optoelectronic defence systems for surveillance, and chemical and biological threat warning. It will have the potential to establish new industries, as well as generate disruptive technologies directly relevant to several industry sectors already established in Australia.