Study on Multi-scale Nano-measurement of Microparts using Optically Oscillated Microprobe

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Investigations to establish assessment technologies for nanometer order accuracy of a micropart based on the concept of the nano-CMM (Coordinate Measuring Machine) are summarized as follows ;1.The single-beam gradient-force sustains an optically oscillating microprobe in air. The position sensing method is proposed by introducing a PSD (Position Sensing detector) as an oscillation detector. The change of the damping effect is brought by the thin layer of air between the probe sphere surface and the specimen's surface. The phase delay increases also according to changing of the damping effect close to the specimen's surface. So, the probe detects a position based on the response amplitude reduction together with the phase delay increase.2.To verify the validity of the vibrational probing method, the vibrating conditions such as the amplitude and the phase delay are measured by lateral probing of the as-cleaved silicon wafer edge using a probe sphere with diameter of 8 μm. The measurement results suggest that the proposed probing technique is useful for detecting a lateral position with the actual resolution of finer than 23 nm and the repeatability of 13.7 nm.3.Motion accuracy of the stage system for measuring 3D-coordinate system is evaluated by using a heterodyne laser interferometer of which the wave length of the He-Ne laser is traceable to the standard length. The usefulness of the stage system with positioning resolution of 5 nm and lost-motion accuracy of better than 16 nm is verified for establishing the nano-CMM system.4.In order to estimate total uncertainty for the developed nano-CMM system, three dimensional form measurement. of a standard micro glass sphere of 168 ±8.5 μm in diameter is performed. The diameter is evaluated 162.9 μm. This suggests that the measurement system is effective for micro-form measurement with an accuracy of nanometer order.