Study on Multi-scale Nano-measurement of Microparts using Optically Oscillated Microprobe

光振荡微探针多尺度纳米测量研究

基本信息

  • 批准号:
    15206016
  • 负责人:
  • 金额:
    $ 31.87万
  • 依托单位:
  • 依托单位国家:
    日本
  • 项目类别:
    Grant-in-Aid for Scientific Research (A)
  • 财政年份:
    2003
  • 资助国家:
    日本
  • 起止时间:
    2003 至 2006
  • 项目状态:
    已结题

项目摘要

Investigations to establish assessment technologies for nanometer order accuracy of a micropart based on the concept of the nano-CMM (Coordinate Measuring Machine) are summarized as follows ;1.The single-beam gradient-force sustains an optically oscillating microprobe in air. The position sensing method is proposed by introducing a PSD (Position Sensing detector) as an oscillation detector. The change of the damping effect is brought by the thin layer of air between the probe sphere surface and the specimen's surface. The phase delay increases also according to changing of the damping effect close to the specimen's surface. So, the probe detects a position based on the response amplitude reduction together with the phase delay increase.2.To verify the validity of the vibrational probing method, the vibrating conditions such as the amplitude and the phase delay are measured by lateral probing of the as-cleaved silicon wafer edge using a probe sphere with diameter of 8 μm. The measurement results suggest that the proposed probing technique is useful for detecting a lateral position with the actual resolution of finer than 23 nm and the repeatability of 13.7 nm.3.Motion accuracy of the stage system for measuring 3D-coordinate system is evaluated by using a heterodyne laser interferometer of which the wave length of the He-Ne laser is traceable to the standard length. The usefulness of the stage system with positioning resolution of 5 nm and lost-motion accuracy of better than 16 nm is verified for establishing the nano-CMM system.4.In order to estimate total uncertainty for the developed nano-CMM system, three dimensional form measurement. of a standard micro glass sphere of 168 ±8.5 μm in diameter is performed. The diameter is evaluated 162.9 μm. This suggests that the measurement system is effective for micro-form measurement with an accuracy of nanometer order.
基于纳米三坐标测量机(CMM)的概念,建立了微小零件纳米级精度的评定技术,主要研究内容如下:1.利用单光束梯度力在空气中支撑光学振荡微探针。通过引入PSD(位置传感检测器)作为振荡检测器,提出了位置传感方法。阻尼效应的变化是由探头球表面与试样表面之间的一层空气引起的。随着试样表面附近阻尼效应的变化,相位延迟也随之增大。为了验证振动探测方法的有效性,采用直径为8 μm的探针球对解理硅片边缘进行横向探测,测量了硅片边缘的振幅和相位延迟等振动条件。测量结果表明,所提出的探测技术是有用的,用于检测一个横向位置的实际分辨率小于23 nm,重复性为13.7 nm。3.使用外差激光干涉仪,其中的He-Ne激光的波长是溯源到标准长度的测量三维坐标系的工作台系统的运动精度进行评估。验证了该平台系统的有效性,其定位分辨率为5 nm,空动精度优于16 nm。4.为了评估所研制的纳米三坐标测量机系统的总不确定度,进行了三维形状测量。对直径为168 ±8.5 μm的标准微玻璃球进行了测量。直径估计为162.9 μm。这表明该测量系统对于纳米级精度的微小形状测量是有效的。

项目成果

期刊论文数量(88)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
Study on High Precise-3-Dimensional Coordinate Measurement with Laser Trapping Probe
激光捕获探头高精度三维坐标测量研究
橋本隆希, 高谷裕浩, 三好隆志: "光ファイバを用いたナノCMMプローブの研究(第2報)-光ファイバによるレーザトラッピング基礎特性解析-"2004年度精密工学会春季大会学術講演会講演論文集. 東京(発表予定). (2004)
Takaki Hashimoto、Hirohiro Takatani、Takashi Miyoshi:“使用光纤的纳米 CMM 探针的研究(第 2 次报告)-使用光纤的激光捕获的基本特性分析 -”2004 年东京精密工程学会春季会议学术演讲论文集。提出)(2004)。
  • DOI:
  • 发表时间:
  • 期刊:
  • 影响因子:
    0
  • 作者:
  • 通讯作者:
光ファイバを用いたナノCMMプローブの研究 -トラップカのFDTDシミユレーションー
光纤纳米CMM探针研究——Trapka的FDTD模拟
Vibrational Probing Technique for the Nano-CMM based on Optical Radiation Pressure Control
  • DOI:
    10.1016/s0007-8506(07)60730-6
  • 发表时间:
    2004
  • 期刊:
  • 影响因子:
    0
  • 作者:
    Y. Takaya;K. Imai;Taeho Ha;T. Miyoshi;N. Kinoshita
  • 通讯作者:
    Y. Takaya;K. Imai;Taeho Ha;T. Miyoshi;N. Kinoshita
The 3D manipulation of a microsphere for nano-CMM probe using single fiber optical trapping
使用单光纤光捕获对纳米 CMM 探针微球进行 3D 操作
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TAKAYA Yasuhiro其他文献

TAKAYA Yasuhiro的其他文献

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{{ truncateString('TAKAYA Yasuhiro', 18)}}的其他基金

Analysis of polishing machanism using chemical reactive nanoparticles based on Raman spectrum enhanced by localized and propagating surface plasmon resonance
基于局域和传播表面等离子体共振增强拉曼光谱的化学反应纳米颗粒抛光机理分析
  • 批准号:
    24656104
  • 财政年份:
    2012
  • 资助金额:
    $ 31.87万
  • 项目类别:
    Grant-in-Aid for Challenging Exploratory Research
Study on molecular processing by using fullerenol for digital nano-patterning Study on molecular processing by using fullerenol for digital nano-patterning Study on molecular processing by using fullerenol for digital nano-patterning
利用富勒烯醇进行数字纳米图案化的分子加工研究 利用富勒烯醇进行数字纳米图案化的分子加工研究 利用富勒烯醇进行数字纳米图案化的分子加工研究
  • 批准号:
    21360064
  • 财政年份:
    2009
  • 资助金额:
    $ 31.87万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Study on Laser Trapping Probe for Measuring Fine Machined 3-D Form with High Aspect Ratio
用于测量高深宽比精加工 3D 形状的激光捕获探针研究
  • 批准号:
    13450057
  • 财政年份:
    2001
  • 资助金额:
    $ 31.87万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Development of Nonlaminate Stereolithography System Using TFTLCD
使用 TFTLCD 的非层压立体光刻系统的开发
  • 批准号:
    12555033
  • 财政年份:
    2000
  • 资助金额:
    $ 31.87万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Nano-Defects Inspection in Polished Silicon Wafer Sub-Surface Using IR Evanescent Light
使用红外倏逝光对抛光硅片亚表面进行纳米缺陷检测
  • 批准号:
    11450058
  • 财政年份:
    1999
  • 资助金额:
    $ 31.87万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B).
Development of Micromachining Tool Driven by Radiation Pressure
辐射压力驱动微加工刀具的发展
  • 批准号:
    10555039
  • 财政年份:
    1998
  • 资助金额:
    $ 31.87万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)

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