Study on Multi-scale Nano-measurement of Microparts using Optically Oscillated Microprobe

基于纳米三坐标测量机概念建立微小零件纳米级精度评定技术的研究综述如下：1.单光束梯度力支撑空气中的光学振荡微探头。通过引入位置传感探测器PSD作为振荡探测器，提出了一种位置传感方法。由于探头球面与试件表面之间存在较薄的一层空气，从而引起了减振效果的变化。位相延迟也随着靠近试件表面的阻尼效应的变化而增大。因此，探头基于响应幅度减小和相位延迟增加来检测位置。2.为了验证振动探头方法的有效性，用直径为8μm的探针球对解理硅片边缘进行横向探测，测量了振动的振幅和相位延迟等振动条件。测量结果表明，该探测技术可用于测量横向位置，其实际分辨率小于23 nm，重复性为13.7 nm。3.利用He-Ne激光波长可追溯到标准长度的外差激光干涉仪对三维坐标系测量工作台系统的运动精度进行了评估。验证了定位分辨率为5 nm、失步精度优于16 nm的工作台系统对建立纳米三坐标测量机系统的有效性。4.为了估计所研制的纳米三坐标测量机系统的总不确定度，进行了三维形体测量。制作了直径为16 8±8 5μm的标准微玻璃球。直径估计为162.9μm，这表明该测量系统对微小形状的测量是有效的，精度为纳米级。

Investigations to establish assessment technologies for nanometer order accuracy of a micropart based on the concept of the nano-CMM (Coordinate Measuring Machine) are summarized as follows ;1.The single-beam gradient-force sustains an optically oscillating microprobe in air. The position sensing method is proposed by introducing a PSD (Position Sensing detector) as an oscillation detector. The change of the damping effect is brought by the thin layer of air between the probe sphere surface and the specimen's surface. The phase delay increases also according to changing of the damping effect close to the specimen's surface. So, the probe detects a position based on the response amplitude reduction together with the phase delay increase.2.To verify the validity of the vibrational probing method, the vibrating conditions such as the amplitude and the phase delay are measured by lateral probing of the as-cleaved silicon wafer edge using a probe sphere with diameter of 8 μm. The measurement results suggest that the proposed probing technique is useful for detecting a lateral position with the actual resolution of finer than 23 nm and the repeatability of 13.7 nm.3.Motion accuracy of the stage system for measuring 3D-coordinate system is evaluated by using a heterodyne laser interferometer of which the wave length of the He-Ne laser is traceable to the standard length. The usefulness of the stage system with positioning resolution of 5 nm and lost-motion accuracy of better than 16 nm is verified for establishing the nano-CMM system.4.In order to estimate total uncertainty for the developed nano-CMM system, three dimensional form measurement. of a standard micro glass sphere of 168 ±8.5 μm in diameter is performed. The diameter is evaluated 162.9 μm. This suggests that the measurement system is effective for micro-form measurement with an accuracy of nanometer order.