Development of Micromachining Tool Driven by Radiation Pressure

光捕获技术是一种利用辐射压力对微观粒子进行控制和操纵的技术，已广泛应用于生物学和微化学等各个领域。在这项研究中，我们提出光捕获技术也可以用于微加工。一些由金刚石制成的设计形状的颗粒，既可以被捕获力捕获，又可以被光扭矩旋转，可以用作微磨削或抛光的工具。所设计的形状粒子作为微加工工具，由辐射压力驱动和控制。基于我们的数学模型开发了一个模拟器，可以定义主要由俘获力和光转矩施加的任意形状粒子的运动。根据仿真结果设计了微加工工具，并利用光刻技术制作了微加工工具。本文的主要研究成果总结如下：(1)提出了一种由翅片和刀片组成的设计刀具，并对翅片进行了几何设计，以控制辐射压力和有效旋转。由金刚石制成的工具部件具有锋利的边缘，适合微加工。(2)将任意形状的金刚石磨粒光学捕获并驱动于硅片表面。实验结果表明，捕获的磨粒可以用于纳米级分辨率的微加工。(3)实验证实了利用圆偏振聚焦激光束捕获二氧化硅颗粒和金刚石磨料颗粒的可控旋转。通过改变极化状态可以改变旋转速率。(4)对所设计的二氧化硅困在空气中的工具的运动特性进行了预测，结果表明，当激光束产生的扭矩与周围空气施加的阻力扭矩相平衡时，可以实现3800转/分的高转速。这很好地验证了激光捕获二氧化硅或金刚石所设计的刀具可以用于纳米加工。(5)建立了基于光刻技术和金刚石薄膜沉积的金刚石设计刀具的制造工艺。制作了两种尺寸的原型，并对其公差和功能进行了评价。少

Optical trapping technology, which utilizes radiation pressure to control and manipulate microscopic particles, has been widely used in various fields, such as biology and microchemistry. In this study, we propose that optical trapping technology can also be used in micromachining. Some designed-shaped-particles made of diamond, which can not only be trapped by the trapping force but also rotated by the optical torque, might be used as tools for micro-grinding or polishing. The designed-shaped-particle is used as a micromachining tool driven and controlled by radiation pressure. A simulator has been developed based on our mathematical model and the motion of arbitrary shaped particles exerted primarily by trapping force and optical torque can be defined. A micromachining tool is designed based on simulation results and fabricated by using photolithography techniques. Main results of this study are summarized as follows(1) A designed-tool composed of a fin part and a tool part is propos … More ed. The fin part is geometrically designed for the control of radiation pressure and efficient rotation. The tool part made of diamond has a sharp edge for micromachining.(2) A diamond abrasive grain with arbitrary shape is optically trapped and driven on a silicon wafer surface. The experimental results show that the trapped abrasive grain can be used for micromachining with nanometer order resolution.(3) We confirmed controllable rotation of a silica particle and a diamond abrasive grain trapped using a focused laser beam with circular polarization experimentally. Rotation rate is changeable by changing polarization state.(4) The movement behavior of a designed-tool made of silica trapped in air has been predicted and it has been shown that high rotation speed of 3800 rpm can be achieved when the torque produced by the laser beam is balanced by the drag torque exerted by the surrounding air. This gives a good verification that designed-tool made of silica or diamond trapped by laser beam can be used in nanometer machining.(5) The fabrication process for a designed-tool made of diamond is established based on the photolithograph technique and the diamond thin film deposition. Two sizes of the prototyping are fabricated and evaluated their tolerances and functions. Less