Study on molecular processing by using fullerenol for digital nano-patterning Study on molecular processing by using fullerenol for digital nano-patterning Study on molecular processing by using fullerenol for digital nano-patterning

通过本研究首次提出的富勒烯醇水溶液铜化学机械抛光和原位拉曼光学表面测量，揭示了分子狂欢中材料去除的化学效应和机械效应的机理。在这些基础知识的基础上，发现单个富勒烯分子对化学反应效应的可控性使得利用功能粒子作为分子加工工具实现数字纳米图案化加工技术成为可能。

The material removal mechanisms with the chemical and mechanical effects in molecular revel was revealed by the Cu-CMP using the water-soluble fullerenol slurry and the optical surface measurement using in situ Raman analysis method that are originally developed in this study. Based on these fundamental knowledges, it is found that the controllability of chemical reactive effect by single fullerenol molecule makes it possible to achieve the digitally nano-controlled patterning process technique using a functional particle as a molecular machining tool.