Development of nano-scale surface treatment system using vacuum vapor deposition technique

厚度为单层的超薄有机薄膜作为边界润滑膜在微机电系统（MEMS）、纳米压印和磁存储器件等领域受到广泛关注。烷基硅烷自组装单层（sam）或具有活性端基的全氟聚醚（PFPE）就是用于此类目的的例子。为了获得足够的固体表面寿命，有机硅烷或PFPE分子应该被强烈吸附在固体表面上。有机分子在固体表面的吸附性能取决于固体表面吸附位点的面密度。另一方面，类金刚石（DLC）薄膜由于其高硬度、化学惰性、极低摩擦和高耐磨性在过去三十年中引起了人们的广泛关注。一般来说，有机薄膜沉积在DLC表面使用浸涂或浸泡的方法在大气中，这使用溶胶…更多的溶液含有目标润滑剂分子。将新沉积的碳膜暴露在大气中是不可取的，因为润滑剂分子的主要吸附位点（如悬垂键）由于表面氧化和污染而减少。在真空气相沉积中，碳膜的沉积和润滑油分子在沉积的碳表面上的固定可以在真空中完成。在本研究中，采用真空气相沉积工艺可以避免新沉积碳表面的氧化和污染，并且可以实现牢固的润滑剂结合。通过在碳膜中掺入F、N、O、Si和一些金属等元素，可以改变DLC膜的结构和化学成分。由于这些碳膜的表面化学和结构不同，有机润滑剂分子与碳表面的键合特性会发生变化。在这项研究中，我们描述了具有羟基的有机分子对DLC (a- c:H), N-DLC （a- c:H:N）和Si-DLC （a- c:H:Si）等不同碳膜的吸附性能。我们发现N和Si的加入通过改变DLC表面的表面结构和化学性质来增强有机分子在DLC表面的吸附性能。少

Ultrathin organic films with thickness on the order of monolayers have been a subject of great interest as boundary lubricant films in the fields of microelectromechanical systems (MEMS), nanoimprint and magnetic storage devices. The alkylsilane self-assembled monolayers (SAMs) or perfluoropolyethers (PFPE) with reactive end groups are examples that have been used for such a purpose. To obtain an adequate lifetime of a solid surface, organic silane or PFPE molecules should be strongly adsorbed on the solid surfaces. The adsorption properties of the organic molecules on the solid surfaces depend on the areal density of adsorption sites on the solid surfaces. On the other hand, diamond-like carbon (DLC) films have attracted much interest in the past three decades due to their high hardness, chemical inertness, extremely low friction and high wear resistance. Generally, organic thin films are deposited on DLC surfaces using dip coating or immersion methods in the atmosphere, which use sol … More utions containing the target lubricant molecules. The exposure of freshly deposited carbon films to the atmosphere is undesirable because the main adsorption sites of the lubricant molecules such as dangling bonds are reduced owing to surface oxidation and contamination. In vacuum vapor deposition, the deposition of carbon films and the fixing of lubricant molecules on the deposited carbon surfaces can be accomplished in a vacuum. In the present study, the surface oxidation and contamination of the freshly deposited carbon surfaces could be avoided, and strong lubricant bonding could be achieved by using the vacuum vapor deposition process. The structure and chemical composition of DLC films can be modified by the incorporation of elements such as F, N, O, Si and some metals into the carbon films. Since the surface chemistry and structure of these carbon films differ, the bonding characteristics of the organic lubricant molecules to the carbon surfaces would be changed. In this study, we described the adsorption properties of organic molecules having a hydroxyl end group to various carbon films such as DLC (a-C:H), N-DLC (a-C:H:N) and Si-DLC (a-C:H:Si). We found that the addition of N and Si enhanced the adsorption properties of organic molecules to the DLC surfaces by changing the surface structure and chemistry of the DLC surfaces. Less