Control of Structural and Adsorption Properties of Diamond-Like Carbon Films by Adding Various Elements

本研究通过在类金刚石(DLC)薄膜中添加不同的元素来控制DLC薄膜的结构性质，并对所制备的DLC薄膜的力学、物理和吸附性能进行了研究和阐明。采用了等离子体化学气相沉积、电离气相沉积、等离子体基离子注入和沉积技术等多种技术来沉积薄膜。分子模拟得到的表面性质、体相性质和力学性质与实验结果定性吻合。

In this study, structural properties of diamond-like carbon (DLC) films were controlled by adding various elements in DLC film, and mechanical, physical and adsorption properties of developed DLC films were investigated and clarified. Various techniques such as plasma CVD, ionization vapor deposition, plasma-based ion implantation and deposition technique were used for the film deposition. The surface and bulk properties and the mechanical properties obtained by molecular simulation show good agreement qualitatively with those obtained by experimental studies.