Control of Structural and Adsorption Properties of Diamond-Like Carbon Films by Adding Various Elements

添加各种元素控制类金刚石碳膜的结构和吸附性能

• 批准号: 20246034
• 负责人: KATO Takahisa
• 金额: $ 16.81万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2008
• 资助国家: 日本
• 起止时间: 2008 至 2010
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-20246034/
• 关键词: トライボロジー; 固体薄膜; 潤滑; 表面・界面物性; DLC膜; 吸着; 分子シミュレーション; 有機膜

In this study, structural properties of diamond-like carbon (DLC) films were controlled by adding various elements in DLC film, and mechanical, physical and adsorption properties of developed DLC films were investigated and clarified. Various techniques such as plasma CVD, ionization vapor deposition, plasma-based ion implantation and deposition technique were used for the film deposition. The surface and bulk properties and the mechanical properties obtained by molecular simulation show good agreement qualitatively with those obtained by experimental studies.

本研究通过在类金刚石(DLC)薄膜中添加不同的元素来控制DLC薄膜的结构性质，并对所制备的DLC薄膜的力学、物理和吸附性能进行了研究和阐明。采用了等离子体化学气相沉积、电离气相沉积、等离子体基离子注入和沉积技术等多种技术来沉积薄膜。分子模拟得到的表面性质、体相性质和力学性质与实验结果定性吻合。

项目成果

古典分子動力学法を用いたDLC膜内部における原子構造の解析

使用经典分子动力学方法分析 DLC 薄膜内部的原子结构

• 发表时间: 2008
• 作者: M Ikeyama;S Nakao;T Sonoda;J Choi;松尾薫;永沼博;熊谷知久,泉聡志,加藤孝久
• 通讯作者: 熊谷知久,泉聡志,加藤孝久

Critical Shear Stress of DLC Films with Different Film Thickness

不同膜厚DLC薄膜的临界剪切应力

• 发表时间: 2009
• 作者: J Choi;K Ishii;T Kumagai;T Kato
• 通讯作者: T Kato

Observation of Self-Assembled Monolayers on Diamond-Like Carbon Films

类金刚石碳膜上自组装单分子层的观察

• 发表时间: 2009
• 作者: J Choi;K Sakurai;T Kato
• 通讯作者: T Kato

Nitriding of high speed steel by bipolar PBII for improvement in adhesion strength of DLC films

双极PBII对高速钢渗氮以提高DLC膜的结合强度

• 发表时间: 2011
• 期刊: Nuclear Instruments & Methods in Physics Research B
• 作者: J Choi;K Soejima;T Kato;M Kawaguchi;W Lee
• 通讯作者: W Lee

Thermal Stability of SiBCN Films

SiBCN 薄膜的热稳定性

• 发表时间: 2008
• 期刊: Tribology Online 3(5)
• 作者: N Hayashi;J Choi;T Kumagai;T Kato;M Kawaguchi;S Nakao;M Ikeyama
• 通讯作者: M Ikeyama