Development of a surface gradient integrated profiler for the next generation high accuracy mirror

开发下一代高精度反射镜表面梯度集成轮廓仪

• 批准号: 19206019
• 负责人: ENDO Katsuyoshi
• 金额: $ 30.45万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2007
• 资助国家: 日本
• 起止时间: 2007 至 2010
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-19206019/
• 关键词: 形状測定; 高精度ミラー; 非球面光学素子; 法線ベクトル; 5軸同時制御; 形状誤差; 絶対形状測定; 超精密加工; 形状計測; スロープエラー; ロータリーエンコーダ; 高精度ゴニオメータ; 角度検出光学系; 最小二乗法; アルゴリズム; ロータリーエンコーダー

In order to develop X-ray free electron laser sources, the ultraprecision asymmetric mirrors which realize nano-focusing and high coherence are indispensable. In industry, the high accurate asymmetric mirrors are required for extreme ultraviolet lithography which is a promising fabrication technology for semiconductor devices.A surface gradient integrated profiler can be developed for the next generation high accuracy asymmetric mirrors. The new profiler is based on the straightness of laser light without a reference surface. The performances of the profiler are as follows. The accuracy of measurement of the mirror profile is 1 nmPV. The resolution of measurement of the rotation angle is 0.17 μrad. And the time of measurement is 5 min/sample. A spherical mirror with a radius of 400 mm is measured by the profiler. The repeatability of two-dimensional profile measurements is less than 1 nm. The profile of the spherical mirror with R = 400 mm to be measured by using the profiler is compared with that measured by using the Fizeau interferometer and coordinate measuring machine. The profile measured by using the profiler coincides with that measured by using other profilers, within approximately 10 nm. These differences of profiles are based on systematic errors, respectively.

为了开发X射线游离电子激光源，意识到纳米焦点和高相干性的超压缩反射镜是必不可少的。极度紫外线光刻需要高准确的不对称镜子，这是半导体设备的承诺制造技术。可以为下一代高精度不对称镜子开发表面梯度集成剖面。新的分析器基于没有参考表面的激光光的直度。参考器的性能如下。镜像的测量准确性为1 NMPV。旋转角度测量的分辨率为0.17μRAD。测量时间为5分钟/样品。半径为400毫米的球形镜由探测仪测量。二维轮廓测量的可重复性小于1 nm。比较使用fizeau干涉仪和坐标测量机进行测量的r = 400 mm的球形镜的轮廓。通过使用Profiler使用的剖面与使用其他探险仪在大约10 nm之内测量的轮廓与该轮廓相吻合。这些概况的差异分别基于系统错误。

项目成果

Time-Resolve X-ray Reflectom ettry in the Multiwavelength Dispersive Geometry

多波长色散几何中的时间分辨X射线反射技术

• 发表时间: 2009
• 作者: Tadasgi.Matsushita;Etsuo Arakawa;Tetsuo Harada;Tadashi Hatano;Yasuo Higashi;York F.Yano;Yasuhiro Niwa;Yasuhiro Inada;Shusaku Nagano;Takahiro Seki
• 通讯作者: Takahiro Seki

Development of surface gradient integrated profiler-Precise coordinate determination of normal vector measured points by self-calibration method and new data analysis from normal vector tosurface profile-

表面梯度综合轮廓仪的开发-通过自校准方法精确确定法向矢量测量点的坐标以及从法向矢量到表面轮廓的新数据分析-

• 发表时间: 2009
• 作者: T.Ueno;S.Tachibanada;Y.Higashi;K.Endo
• 通讯作者: K.Endo

回転対称形状の超精密形状測定方法及びその装置

旋转对称形状超精密形状测量方法及装置

• 发表时间: 2009

Surface Gradient Integrated Profiler for X-ray and EUV Optics

适用于 X 射线和 EUV 光学器件的表面梯度集成轮廓仪

• 发表时间: 2006
• 期刊: SR12006, Proc. of the Ninth International Conference on Synchrotron Radiation Instrumentation, May28-June2, 2006, DAEGU, EXCO, KOREA (In printing)
• 作者: Yasuo Higashi;Yuichi Takaie;Katsuyoshi Endo;Tatsuya Kume;Kazuhiro Enami;Kazuto Yamauchi;Kazuya Yamamura;Yasuhisa Sano;Kenii Ueno;Yuzo mori
• 通讯作者: Yuzo mori

Development of a s urface gradient integrated profiler : precise coordinate determination of norm al vector measured points by self-cali bration method and new data analysis from normal vector to surface profile

表面梯度集成轮廓仪的开发：通过自校准方法精确确定法向矢量测量点的坐标以及从法向矢量到表面轮廓的新数据分析

• 发表时间: 2008
• 作者: Y. Higashi;T. Ueno;K. Endo;J. Uchikosh i;T. Kume;K. Enami
• 通讯作者: K. Enami