A new high speed nano-profiler using the normal vector tracing method for next generation ultraprecision mirrors.

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It is necessary to measure the high accuracy aspherical mirror and lens with nano scale precision. We succeeded to develop the high speed nano-profiler using the normal vector tracing method. The performances of the nano-profiler are as follows. The precision in other words reputability is greater than 1nm. The measuring time is less than 10min/sample.The convex spherical mirrors with 100mm, 400mm and 1000mm radius of curvature, a reference sphere with 46.818489mm+-10nm radius of curvature, plane mirror and an aspherical mirror measured by the nano-profiler. In the case of an aspherical mirror measurement, the reputability indicated by the standard deviation is 0.37nm. The reputability indicated by the deviation value equivalent is 1.60nm PV. We also compared the aspherical mirror measurement results with those obtained using a Fizeau interferometer. The two measurement results of the mirror were consistent within the range of the each equipment systematic error.