Characterization of insulator surfaces after ultra-precision machining by STM/STS with high-frequency pulses
Characterization of insulator surfaces after ultra-precision machining by STM/STS with high-frequency pulses
批准号:
13450056
负责人:
ENDO Katsuyoshi
金额:
$9.73万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (B)
财政年份:
2001
资助国家:
日本
项目状态:
已结题
起止时间:
2001 至 2003
中文摘要
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英文摘要
The purpose of this study is to develop a scanning tunneling microscopy (STM)/ scanning tunneling spectroscopy (STS) system operated by high-frequency pulses in order to observe either atomic distributions or electronic structures of insulator surfaces. Furthermore, we aim at evaluating insulator surfaces after ultra-precision machining processes, and optimizing the condition of the machining process. In order to observe insulator surfaces with STM, we have to apply bias voltages high enough for electrons to tunnel into the conduction band of the insulator surface, and the voltage has to be applied as alternating short pulses (< 1 msec) to avoid the electrification and the destruction of the insulator surface. In addition, we have to develop the feedback circuit of which the source is not a displacement current originated from a stray capacitance but tunneling current between. a probe and a sample. Tunneling current spectroscopy is also necessary to elucidate defect states of insulator … More surfaces.We have developed the RC circuit in which tunneling current can be detected without being hindered by displacement current induced by a rectangular short voltage pulse. The prototype of STM system operated by high-frequency pulses has been constructed in which high-frequency rectangular voltage pulses (frequency : more than 10 kHz, amplitude: up to ±10V) can be applied to the tunneling junction. After the output of the detecting circuit of tunneling current is rectified by a diode, the signal has been controlled by a feedback loop. We have succeeded in obtaining atomic images of highly oriented pyrolytic graphite (HOPG) surfaces by the constructed system. However, atomically resolved images have not been obtained yet of either an intrinsic Si surface or a Si wafer covered with native oxides. In order to observe atomic images of these surfaces, the ratio of signal to noise of a current amplifier must be improved at a high-frequency (>100 kHz) region. At the same time, we have to achieve the higher cut-off frequency of the feedback system. We have designed a new feedback control system for high-frequency STM. The new system equips a current amplifier operated at the high-frequency region, and a lock-in amplifier in order to amplify the component of tunneling current at the specific frequency of applied rectangular pulses. This system does not need a rectifying circuit by a diode, which enhances the ratio of signal to noise. We have confirmed that the cut-off frequency of the new feedback control system is 1.0 kHz. It is expected that insulator surfaces can now be resolved in an atomic scale. Less
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遠藤 勝義 他: "光照射を利用した水素化アモルファスシリコン表面の走査型トンネル顕微鏡観察"精密工学会2003年度関西地方定期学術講演会講演論文集. 49-50 (2003)
Katsuyoshi Endo 等人:“利用光照射对氢化非晶硅表面进行扫描隧道显微镜观察”日本精密工程学会 2003 年关西地区定期学术会议论文集 49-50 (2003)。
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Katsuyoshi Endo et al.: "Atomic image of hydrogen-terminated Si(001) surfaces after wet cleaning and its first-principles study"Journal of Applied physics. 91・6(inpress). (2002)
Katsuyoshi Endo 等人:“湿法清洁后氢封端的 Si(001) 表面的原子图像及其第一性原理研究”应用物理学杂志 91・6(inpress)。
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遠藤勝義 他: "カ-ボンナノチューブを探針にしたSTM/SREMによるSi表面の観察"2002年度精密工学界春季大会学術講演界講演論文集. (2002)
Katsuyoshi Endo 等:“使用碳纳米管作为探针通过 STM/SREM 观察 Si 表面”2002 年精密工程学会春季会议学术会议论文集(2002 年)。
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Katsuyoshi Endo et al.: "Visible Light Irradiation Effects on Atomic-Scale Observations of Hydrogenated Amorphous Silicon Films by Scanning Tunneling Microscopy"2003 International Conference on SOLID STATE DEVICES AND MATERIALS. 500-501 (2003)
Katsuyoshi Endo 等人:“可见光照射对扫描隧道显微镜对氢化非晶硅薄膜原子尺度观察的影响”2003 年国际固态器件和材料会议。
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遠藤 勝義 他: "SREM/STMによるSi表面の観察"精密工学会2003年度関西地方定期学術講演会講演論文集. 45-16 (2003)
Katsuyoshi Endo 等人:“SREM/STM 的 Si 表面观察”日本精密工程学会 2003 年关西地区定期学术会议记录 45-16 (2003)。
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共 25 条
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