Development of New Technology for Micro-Machine Fabrication

两种基板的粘接是研制新型微机械的关键技术。到目前为止，许多研究人员已经开发并建立了一种制造微小结构的技术。然而，传统的小结构双基板连接技术存在很多问题，新的连接技术有望得到发展。在本研究项目中，我们研究了在正常条件下(温度和压力)的几种连接方法。首先，我们尝试了在玻片上利用多离子层的静电作用力进行连接。结果表明，在500V以上的电场作用下，可以实现连接，其结合力为1.36kgf·cm~(-2)~(-2)。接下来，利用青贮料偶联剂的聚合反应进行玻璃基板的连接。将硅烷偶联剂涂在两块玻璃基板之间，无需加热和外加电势即可实现连接，粘结力为5.6kgf cm~(-2)~(-2)。此外，还证实了该技术可用于无泄漏微流道的施工。最后，对聚二甲基硅氧烷(PDMS)微流道进行了研究。在PDMS基板上制作微通道，然后在基板上覆盖玻璃，不需要任何焊接剂。实验结果表明，该技术可以应用于微电极系统中，实现了无泄漏的水流流动。为此，我们在玻璃衬底上制作了阵列式微酶电极，并利用PDMS微通道研制了酶流量传感器。该传感器对葡萄糖和乳酸有很好的电化学响应，选择性高。

Bonding of two substrates is key technology for development of new micro-machine. Until now, a technique to fabricate small structure have been developed and established by a lot of researchers. However, traditional joining techniques of two substrate with small structure have a lot of problem, and development of new joining technique has been hoped. In this research project, we study some joining methods in normal condition(temperature and pressure). Firstly, we tried the joining by using electrostatic force of poly-ion layer on glass slides. It was found that the joining could be achieved by applying an electrical potential above 500 V, and the joining force was 1.36 kgf cm^<-2>. Next, a polymerization reaction of silage-coupling reagent was employed for the joining of glass substrates. By spreading the silane-coupling reagent between two glass substrates, the joining could be achieved without heating and applying electrical potential and the bonding force was 5.6 kgf cm^<-2>.. Moreover, it was confirmed that this technique could be applied for construction of micro-flow-channel without leak. Last, we studied the micro-flow-channel using polydimethylsiloxane(PDMS). Micro-channel was fabricated at PDMS substrate and then the substrate was covered by glass without any reagent for joining. As a result, water flow without leak was observed and it was confirmed that this technique could be applied for micro-electrode system. Therefore, we fabricated an arrayed micro-enzyme electrode on glass substrate, and developed enzyme flow sensor using PDMS micro-channel. This sensor showed good electrochemical response for glucose and lactate with high selectivity.