Development of New Technology for Micro-Machine Fabrication

微机械制造新技术的发展

基本信息

  • 批准号:
    10450100
  • 负责人:
  • 金额:
    $ 8.51万
  • 依托单位:
  • 依托单位国家:
    日本
  • 项目类别:
    Grant-in-Aid for Scientific Research (B).
  • 财政年份:
    1998
  • 资助国家:
    日本
  • 起止时间:
    1998 至 2000
  • 项目状态:
    已结题

项目摘要

Bonding of two substrates is key technology for development of new micro-machine. Until now, a technique to fabricate small structure have been developed and established by a lot of researchers. However, traditional joining techniques of two substrate with small structure have a lot of problem, and development of new joining technique has been hoped. In this research project, we study some joining methods in normal condition(temperature and pressure). Firstly, we tried the joining by using electrostatic force of poly-ion layer on glass slides. It was found that the joining could be achieved by applying an electrical potential above 500 V, and the joining force was 1.36 kgf cm^<-2>. Next, a polymerization reaction of silage-coupling reagent was employed for the joining of glass substrates. By spreading the silane-coupling reagent between two glass substrates, the joining could be achieved without heating and applying electrical potential and the bonding force was 5.6 kgf cm^<-2>.. Moreover, it was confirmed that this technique could be applied for construction of micro-flow-channel without leak. Last, we studied the micro-flow-channel using polydimethylsiloxane(PDMS). Micro-channel was fabricated at PDMS substrate and then the substrate was covered by glass without any reagent for joining. As a result, water flow without leak was observed and it was confirmed that this technique could be applied for micro-electrode system. Therefore, we fabricated an arrayed micro-enzyme electrode on glass substrate, and developed enzyme flow sensor using PDMS micro-channel. This sensor showed good electrochemical response for glucose and lactate with high selectivity.
基片的键合是新型微机械研制的关键技术。到目前为止,许多研究人员已经发展并建立了一种制造小结构的技术。然而,传统的小结构双基板连接技术存在很多问题,人们希望开发新的连接技术。在本研究项目中,我们研究了在正常条件下(温度和压力)的一些连接方法。首先,我们尝试利用载玻片上聚离子层的静电力进行连接。发现通过施加高于500 V的电势可以实现接合,并且接合力为1.36kgf cm-3<-2>。接下来,采用青贮偶联剂的聚合反应来接合玻璃基板。通过在两个玻璃基板之间铺展硅烷偶联剂,可以在不加热和施加电势的情况下实现接合,并且结合力为5.6kgf cm-<-2>3。该技术可用于无泄漏微流道的构建。最后,我们对聚二甲基硅氧烷(PDMS)微流道进行了研究。在PDMS基底上制作微通道,然后在基底上覆盖玻璃,不使用任何连接试剂。实验结果表明,该技术可应用于微电极系统,并可实现无泄漏的水流流动。因此,我们在玻璃基片上制作了阵列式微酶电极,并利用PDMS微通道研制了酶流量传感器。该传感器对葡萄糖和乳酸具有良好的电化学响应,并具有较高的选择性。

项目成果

期刊论文数量(22)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
K.Fukuda: "Self-Organizing Three-Dimensional Colloidal Photomic Crystal Structure with Augmented Dielectric Contrast" Japanese Journal of Applied Physics. 37,5. L508-L511 (1998)
K.Fukuda:“具有增强介电对比度的自组织三维胶体光子晶体结构”日本应用物理学杂志。
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    0
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  • 通讯作者:
S.Juodkazis: "Photoelectrochemical Submicrometer Patterningof Titanium Dioxide by Platinum" Journal of Electroanalytical Chemistry. (in press). (1999)
S.Juodkazis:“铂二氧化钛的光电化学亚微米图案化”电分析化学杂志。
  • DOI:
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    0
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H.Ishii: "Photoelectrochemical Fabrication of Submicrometer Platinum Pattern on Titanium Dioxide Single Crystal Surface" Chemistry Letters. 1998,7. 655-656 (1998)
H.Ishii:“二氧化钛单晶表面上亚微米铂图案的光电化学制造”化学快报。
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    0
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M.Miwa: "Drag of a laser trapped micropariticle"Jpn.J.Appl.Phys.. (in press). (2000)
M.Miwa:“激光捕获微粒的阻力”Jpn.J.Appl.Phys..(出版中)。
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  • 影响因子:
    0
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T.Takahashi: "Morphology Dependent Resonant Lasing of a Dye-doped Microsphere Prepared by Nonlinear Optical Material" Thin Solid Films. 331,1-2. 298-302 (1998)
T.Takahashi:“非线性光学材料制备的染料掺杂微球的形态依赖共振激光”固体薄膜。
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  • 影响因子:
    0
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MISAWA Hiroaki其他文献

MISAWA Hiroaki的其他文献

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{{ truncateString('MISAWA Hiroaki', 18)}}的其他基金

Investigations of origin of Mercury's exospheric atmosphere based on the optical observations with high spatial resolution at optimum observation sites
基于最佳观测地点高空间分辨率光学观测的水星外大气层起源研究
  • 批准号:
    20403010
  • 财政年份:
    2008
  • 资助金额:
    $ 8.51万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Development of Highly Sensitive DNA Microarray Sensor Based on Periodic Metallic Nanostructures
基于周期性金属纳米结构的高灵敏度DNA微阵列传感器的研制
  • 批准号:
    17360110
  • 财政年份:
    2005
  • 资助金额:
    $ 8.51万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Studies on acceleration processes of Iogenic gas and plasma based on stational observations at a suitable site for optical observations
基于适宜光学观测地点的定点观测研究成因气体和等离子体的加速过程
  • 批准号:
    17403007
  • 财政年份:
    2005
  • 资助金额:
    $ 8.51万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Studies on production processes of exospheric atmospheres of Mercury and Io based on development of a spectro-imager
基于光谱成像仪的水星和木卫一外层大气产生过程研究
  • 批准号:
    15340160
  • 财政年份:
    2003
  • 资助金额:
    $ 8.51万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Development of Nonoactuators by Using of Light Radiation Pressure
利用光辐射压力开发非致动器
  • 批准号:
    13305018
  • 财政年份:
    2001
  • 资助金额:
    $ 8.51万
  • 项目类别:
    Grant-in-Aid for Scientific Research (A)
Studies of release and loss processes of Mercury's atmosphere investigated with ground based optical observations
通过地面光学观测研究水星大气层的释放和损失过程
  • 批准号:
    13640445
  • 财政年份:
    2001
  • 资助金额:
    $ 8.51万
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
Studies on dynamical processes among Mercury's atmosphere, magnetosphere and the solar wind based on 2D imaging observations for Mercury's atmospheric emissions
基于水星大气排放二维成像观测的水星大气层、磁层和太阳风动力学过程研究
  • 批准号:
    11640438
  • 财政年份:
    1999
  • 资助金额:
    $ 8.51万
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
Development of Integrated Micro-Chip Device for DNA Analysis
DNA分析集成微芯片装置的研制
  • 批准号:
    11793004
  • 财政年份:
    1999
  • 资助金额:
    $ 8.51万
  • 项目类别:
    Grant-in-Aid for University and Society Collaboration
Development of Ultra-high Density Three-dimensional Optical Data storage System
超高密度三维光学数据存储系统的研制
  • 批准号:
    09355008
  • 财政年份:
    1997
  • 资助金额:
    $ 8.51万
  • 项目类别:
    Grant-in-Aid for Scientific Research (A)
Studies on the Distribution of Sources of Jovian Magnetospheric Plasma Originated from Io Based on Optical Observations
基于光学观测的木星磁层等离子体源分布研究
  • 批准号:
    08640553
  • 财政年份:
    1996
  • 资助金额:
    $ 8.51万
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
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