Development of New Technology for Micro-Machine Fabrication

两基板的键合是开发新型微机械的关键技术。到目前为止，许多研究人员已经发展和建立了一种制造小结构的技术。然而，传统的小结构双基材连接技术存在诸多问题，新的连接技术的发展是有希望的。本课题研究了常温、常压条件下的几种连接方法。首先，我们尝试利用玻片上多离子层的静电力进行连接。结果表明，施加大于500 V的电势即可实现连接，连接力为1.36 kgf cm^<-2>。其次，采用青贮偶联剂的聚合反应进行玻璃基板的连接。通过将硅烷偶联剂铺布在两个玻璃衬底之间，可以在不加热和施加电势的情况下实现连接，结合力为5.6 kgf cm^<-2>。验证了该技术可用于无泄漏微流道的施工。最后，我们研究了聚二甲基硅氧烷（PDMS）的微流道。在PDMS衬底上制备微通道，然后用玻璃覆盖衬底，不使用任何试剂进行连接。实验结果表明，该技术可以应用于微电极系统中。为此，我们在玻璃基板上制备了阵列微酶电极，并利用PDMS微通道开发了酶流量传感器。该传感器对葡萄糖和乳酸具有良好的电化学响应，具有较高的选择性。

Bonding of two substrates is key technology for development of new micro-machine. Until now, a technique to fabricate small structure have been developed and established by a lot of researchers. However, traditional joining techniques of two substrate with small structure have a lot of problem, and development of new joining technique has been hoped. In this research project, we study some joining methods in normal condition(temperature and pressure). Firstly, we tried the joining by using electrostatic force of poly-ion layer on glass slides. It was found that the joining could be achieved by applying an electrical potential above 500 V, and the joining force was 1.36 kgf cm^<-2>. Next, a polymerization reaction of silage-coupling reagent was employed for the joining of glass substrates. By spreading the silane-coupling reagent between two glass substrates, the joining could be achieved without heating and applying electrical potential and the bonding force was 5.6 kgf cm^<-2>.. Moreover, it was confirmed that this technique could be applied for construction of micro-flow-channel without leak. Last, we studied the micro-flow-channel using polydimethylsiloxane(PDMS). Micro-channel was fabricated at PDMS substrate and then the substrate was covered by glass without any reagent for joining. As a result, water flow without leak was observed and it was confirmed that this technique could be applied for micro-electrode system. Therefore, we fabricated an arrayed micro-enzyme electrode on glass substrate, and developed enzyme flow sensor using PDMS micro-channel. This sensor showed good electrochemical response for glucose and lactate with high selectivity.