Development of New Technology for Micro-Machine Fabrication

基片的键合是新型微机械研制的关键技术。到目前为止，许多研究人员已经发展并建立了一种制造小结构的技术。然而，传统的小结构双基板连接技术存在很多问题，人们希望开发新的连接技术。在本研究项目中，我们研究了在正常条件下（温度和压力）的一些连接方法。首先，我们尝试利用载玻片上聚离子层的静电力进行连接。发现通过施加高于500 V的电势可以实现接合，并且接合力为1.36kgf cm-3<-2>。接下来，采用青贮偶联剂的聚合反应来接合玻璃基板。通过在两个玻璃基板之间铺展硅烷偶联剂，可以在不加热和施加电势的情况下实现接合，并且结合力为5.6kgf cm-<-2>3。该技术可用于无泄漏微流道的构建。最后，我们对聚二甲基硅氧烷（PDMS）微流道进行了研究。在PDMS基底上制作微通道，然后在基底上覆盖玻璃，不使用任何连接试剂。实验结果表明，该技术可应用于微电极系统，并可实现无泄漏的水流流动。因此，我们在玻璃基片上制作了阵列式微酶电极，并利用PDMS微通道研制了酶流量传感器。该传感器对葡萄糖和乳酸具有良好的电化学响应，并具有较高的选择性。

Bonding of two substrates is key technology for development of new micro-machine. Until now, a technique to fabricate small structure have been developed and established by a lot of researchers. However, traditional joining techniques of two substrate with small structure have a lot of problem, and development of new joining technique has been hoped. In this research project, we study some joining methods in normal condition(temperature and pressure). Firstly, we tried the joining by using electrostatic force of poly-ion layer on glass slides. It was found that the joining could be achieved by applying an electrical potential above 500 V, and the joining force was 1.36 kgf cm^<-2>. Next, a polymerization reaction of silage-coupling reagent was employed for the joining of glass substrates. By spreading the silane-coupling reagent between two glass substrates, the joining could be achieved without heating and applying electrical potential and the bonding force was 5.6 kgf cm^<-2>.. Moreover, it was confirmed that this technique could be applied for construction of micro-flow-channel without leak. Last, we studied the micro-flow-channel using polydimethylsiloxane(PDMS). Micro-channel was fabricated at PDMS substrate and then the substrate was covered by glass without any reagent for joining. As a result, water flow without leak was observed and it was confirmed that this technique could be applied for micro-electrode system. Therefore, we fabricated an arrayed micro-enzyme electrode on glass substrate, and developed enzyme flow sensor using PDMS micro-channel. This sensor showed good electrochemical response for glucose and lactate with high selectivity.