Applied Study on Ion Absorption Pump for Oxygen by a Reactive Cathode Sputter Discharge

反应阴极溅射放电制氧离子吸收泵的应用研究

• 批准号: 11555008
• 负责人: FUNATO Yasuyuki
• 金额: $ 2.82万
• 依托单位: Suzuka National College of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B).
• 财政年份: 1999
• 资助国家: 日本
• 起止时间: 1999 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-11555008/
• 关键词: Ion Pump; Reactive Cathode; LaB6; Sputter Discharge; Oxygen; Partial Pressure; Plasma Parameter; Out Gases

1. Basic experiment for production and improvement of the LaB6 cathode sputtering ion pump was carried out. In pump container of diameter of 6 cm and made of SUS-304 of the 200mm length, LaB6 disk of 5 mm thickness and 50mm diameter is installed as a cathode electrode.2. The experimental device consists of trial manufacture LaB6 ion pump, traditional-model titanium pump, and differential evacuation pump sysytem. The measurement system was made to be satisfactory by using ultrahigh-vacuum ionization gauge, mass filter type analyzer and Pirani vacuum system.3. The detailed experiment was carried out on the correlation of discharge parameters and pumping characteristic (Pump-down characteristics, exhaust velocity, partial pressure dynamics), and the experimental verification of high exhaust speed of oxygen and water for boron and LaB6 film was got.4. The measurement of plasma parameters. In respect of electron density, electron temperature and space potential of glow-discharge plasma, Langmuir probe was used. The relation of pump exhaust characteristic and sputter discharge became the evidence, and the condition for getting the more high-efficient exhaust was pursued Gas release, absorption behavior during the discharge, recycling behavior with the wall, partial pressure characteristics were analyzed numerically and the results were repored everywhere in the conferences.5. Image diagnostic. The shape of the sputter plasma column was pursued by photographing of the cross sectional photograph and the image processing. These are necessary for the optimization of the plasma production condition for application of the plasma.6. The precise measurement of the residual gas analysis. Especially, each exhaust speed for the partial pressure was measured, and the relation between partial pressure pattern and arrival degree of vacuum was pursued.

1.对LaB 6阴极溅射离子泵的制作和改进进行了基础实验。在直径为6 cm、长为200 mm的SUS-304材料制成的泵容器中，安装厚度为5 mm、直径为50 mm的LaB 6盘作为阴极.实验装置由试制的LaB_6离子泵、传统型钛离子泵和差动真空泵系统组成。采用超高真空电离规、滤质式分析器和皮拉尼真空系统，使测量系统达到满意的效果.对放电参数与抽气特性（抽气特性、排气速度、分压动态特性）的相关性进行了详细的实验研究，得到了硼和LaB 6薄膜高排气速度的实验验证.等离子体参数的测量。采用朗缪尔探针对辉光放电等离子体的电子密度、电子温度和空间电位进行了测量。研究了抽气特性与溅射放电的关系，探讨了获得更高效抽气的条件，对抽气过程中的气体释放、吸收行为、与壁面的再循环行为、分压特性等进行了数值分析，并在会议上广泛报道.影像诊断。溅射等离子体柱的形状通过横截面照片的拍摄和图像处理来追踪。这些都是必要的等离子体生产条件的优化等离子体的应用.残余气体分析的精确测量。特别地，测量了分压的各个排气速度，并追踪了分压模式与真空到达程度之间的关系。

项目成果

Y. Funato: "Studies on a Magnetic Field Configuration for Plasma Processing"MEMOIRS of Suzuka National College of Technology. 32. 43-48 (1999)

Y. Funato：“等离子体处理的磁场配置的研究”铃鹿国立工业大学回忆录。

南条徹: "ボロン化合物陰極を用いたN2/O2混合ガスグロー放電プラズマの特性"鈴鹿工業高等専門学校紀要. 33. 63-66 (2000)

Toru Nanjo：“使用硼化合物阴极的 N2/O2 混合气体辉光放电等离子体的特性”国立工业大学通报，铃鹿 33. 63-66 (2000)。

Y. FUNATO: "Effects of Cathode Material on DC-Glow Discharge in N2/O2 Mixtures"Proc. Int. Conference Phenomena in Ionized Gases; 11-16, July, Warsaw. III. 27-28 (1999)

Y. FUNATO：“阴极材料对 N2/O2 混合物中直流辉光放电的影响”Proc。

Y. Funato: "Dynamics of Nox Gases during a Glow Discharge with Sputter Discharge"BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, Vol. 44. 1・II. 1096-1096 (1999)

Y. Funato：“溅射放电辉光放电期间的氮氧化物气体动力学”，美国物理学会公报，第 44 卷，1・II。

清岡千晶: "スパッタ放電のプラズマ密度、電位分布の測定"鈴鹿工業高等専門学校紀要. 31. 65-70 (1998)

Chiaki Kiyooka：“溅射放电的等离子体密度和电势分布的测量”国立技术学院通报，铃鹿31. 65-70 (1998)。