System Construction and Execution for the expansive upgrading of the practice Education in the College of Technology

工学院实践教育拓展升级的制度建设与实施

• 批准号: 13680214
• 负责人: FUNATO Yasuyuki
• 金额: $ 2.18万
• 依托单位: Suzuka National College of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-13680214/
• 关键词: College of technology; Discharge formation; Glow discharge; NOx gas; N_2; O_2 mixed gas; Plasma device; quadrupole mass spectrometry; Cooperative study; プラズマプロセシング; 工学実践教育; 放電プラズマの開始機構; 酵素、窒素、混合ガス放電; 放電の電圧・電流特性; パルス性前駆現象; プラズマの分光計測; 水素ガス放出

This study aimed to couple education and research and carried out the practical education and the basic process research on an electromagnetic field through a glow discharge experiment. The main experiment and research was performed by using "the electromagnetic field integral experiment equipment", and it was promoted for the synthetic research, and following results and knowledge were obtained. In this study, the following are comprehensively intended in fields such as electricity base, electromagnetic field, gas and solid-state electronics, electronic property, computer hardware/software in the collage curriculum. The experiment and research of gas ionization process in parallel plate electric field. Electric field in generating process of glow discharge plasma, potential and the discharge current were measured carried out and analyzed with a computer method. Generating process and behavior of mixed gas plasma including the NOx gas were pursued as the basic research for air pollution purification. N_2, O_2 and N_2/O_2 mixed gas were used for test gases and correlation measurement of the build-up characteristics of glow discharge were carried out. A new knowledge on the correlation between discharge current and partial pressure, visible radiation spectrum in the discharge initial stage was obtained by measurement and visible light spectrometry of gas pressure with time change, in which the quadrupole mass spectrometry was applied for the measurements. In the capacitive coupling type RF plasma generation, the electric power optimization was attempted by electric circuit analysis, electric phase measurement. The research was performed by the cooperation between technical college, another university, laboratory for graduation research, special research in the advanced course and the above results were reported everywhere.

本研究以教学与科研相结合为目标，通过辉光放电实验，开展电磁场的实践教学和基本过程研究。利用“电磁场综合实验装置”进行了主要的实验研究，并将其推广为综合研究，取得了以下成果和认识。本研究从电学基础、电磁场、气体与固态电子学、电子性能、计算机硬件/软件等方面对高校课程设置进行了综合研究。平行板电场中气体电离过程的实验研究。用计算机方法对辉光放电等离子体产生过程中的电场、电势和放电电流进行了测量和分析。研究了包括NOx气体在内的混合气体等离子体的产生过程和行为，作为大气污染净化的基础研究。以N_2、O_2和N_2/O_2混合气体为实验气体，对辉光放电的建立特性进行了相关测量。通过对气体压力随时间变化的测量和可见光光谱分析，对放电电流与分压、放电初期可见光辐射光谱的关系有了新的认识，其中采用四极杆质谱仪进行测量。在电容耦合型射频等离子体发生器中，通过电路分析、电相测量等方法对电源进行了优化。这项研究是由技术学院、另一所大学、毕业研究实验室、高级课程专题研究等合作进行的，上述结果随处可见。

项目成果

K. Akaishi,, M. Nakasuga, Y. Funato: "Simulation of Hydrogen Outgassing in a Fusion Device and a UHV Chamber by Recombination Limited Model"AVS 48th International Symposium, 11th International Conference on Solid Surfaces. VST-WeM5 (2001)

K. Akaishi,, M. Nakasuga, Y. Funato：“通过重组有限模型模拟聚变装置和特高压室中的氢气逸出”AVS 第 48 届国际研讨会，第 11 届国际固体表面会议。

Yasuyuki FUNATO, Takayoshi NAGASHIMA, Takenori HIRANO, Tohru NANJO: "Gas Dynamics of Non-Equilibrium Plasma in N2, O2 and Air"MEMOIRS of Suzuka National College of Technology, 2002. Vol.35. 75-80 (2002)

Yasuyuki FUNATO、Takayoshi NAGASHIMA、Takenori HIRANO、Tohru NANJO：“N2、O2 和空气中非平衡等离子体的气体动力学”铃鹿工业大学回忆录，2002 年。第 35 卷。

Y.Funato, K.Akaishi, Y.Kubota, M.Mushiaki, T.Hosokawa: "Spectroscopic and QMS Studies of DC-Glow Discharge with Reactive Cathode in N2/O2 Mixtures"Proc.Int.Symposium on Plasma Chemistry, July 9-13, 2001, Orleans. Vol.III. 925-929 (2001)

Y.Funato、K.Akaishi、Y.Kubota、M.Mushiaki、T.Hosokawa：“N2/O2 混合物中活性阴极直流辉光放电的光谱和 QMS 研究”Proc.Int. 等离子体化学研讨会，7 月 9 日

Y, Funato, T. Hosokawa and T. Kaneda: "Prebreakdown Characteristics and Correlations between Current and Optical Phenomena of Low-Pressure Glow Discharges in O_2, N_2 and their Mixtures"Proc. of the XIV International Conference on Gas Discharges and their

Y、Funato、T. Hosokawa 和 T. Kaneda：“O_2、N_2 及其混合物中低压辉光放电的预击穿特性以及电流与光学现象之间的相关性”Proc。

Y Funato, K Akaishi, Y.Kubota, M.Mushiaki: "Effects of Particle Wall Interaction on a Sputter Glow Discharge"Proc. XVth Europhysics Conf. on Atomic and Molecular Physics of Ionized Gases, Miskolc, Hungary,. VOL 24F. 412-413

Y Funato、K Akaishi、Y.Kubota、M.Mushiaki：“粒子壁相互作用对溅射辉光放电的影响”Proc。