EXPERIMENTAL STUDY ON SPUTTER ION PUMP FOR WIDE PRESSURE RANGE

宽压力范围溅射离子泵的实验研究

• 批准号: 05555011
• 负责人: FUNATO Yasuyuki
• 金额: $ 1.47万
• 依托单位: SUZUKA NATIONAL COLLEGE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-05555011/
• 关键词: LaB6 Cathode; Wide pressure range; Water pumping; Sputter pump; QMS measurement; XPS measurement; Plasma parameter; Ultra high vacuum; LaB_6陰極; 水の排気; プラズマシース; グロー放電; イオンポンプ; 六ほう化ランタン; 四重極質量分析計; 膜評価; クリーン真空

The experimental investigation of a sputter ion pump were performed for wide pressure range. The vacuum chamber has a diameter of 6 inches and an length of 200mm. The Lanthanum hexaboride (LaB6) disk of 50mm diameter are used for sputter cathode. The experimental device consists of discharge section and analysis one. The measurements involves ionization gauge, partial pressure gauge, electro static probe for plasma parameters and XPS measurement. The experiment was done by using a glow discharge plasma' and to create boron like thin films on the chamber wall surface. The preliminary experiment showed that the boron film formed on the vacuum wall can pump effectively water vapor. The experiment investigate the correlations between partial pressures of H2O,H2, O2 and plasma parameters of density, temperature and sputter film characteristics during a sputter discharge. The application of LaB6 cathode is a characteristic point of the experiment for developing a new type of sputter vacuum pump. The plasma parameters were measured by Langumuir probe and were estimated to be (2-30) x10^9 of density and 3-5 eV of temperature. The partial pressure was measured by QMS.The most typical result of the experiment is that the water vapor is pumped effectively for wide pressure range by using the LaB6 sputter cathode. The pumping speed is estimated to be about 4m^3/ (m^2s). XPS was performed on the sample tip inserted in the sputter discharge. The signals of B,La, O and C were detected. And the depth profiles of their signals were also measured. The experiment indicated that the sputter discharge with LaB6 cathode can be used for a new type of sputter vacuum pump.

对宽气压范围溅射离子泵进行了实验研究。真空室的直径为6英寸，长度为200 mm。溅射阴极采用直径为50 mm的六硼化镧（LaB_6）圆盘。实验装置由放电段和分析段组成。测量包括电离规、分压规、静电探针等离子体参数测量和XPS测量。实验是用辉光放电等离子体在腔室壁面上形成类硼薄膜。初步实验表明，真空壁面上形成的硼膜能有效地抽运水蒸气。实验研究了溅射放电过程中H_2O、H_2、O_2分压与等离子体密度、温度和溅射膜特性等参数之间的关系。LaB 6阴极的应用是研制新型溅射真空泵实验的一个特点。等离子体参数通过朗古缪尔探针测量，估计为（2-30）x10^9的密度和3-5 eV的温度。实验结果表明，LaB 6溅射阴极可以在较宽的压力范围内有效地抽运水蒸气。抽气速度约为4m^3/（m^2s）。在插入溅射放电中的样品尖端上进行XPS。检测到B、La、O和C的信号。并测量了它们的信号深度剖面。实验表明，LaB 6阴极溅射放电可用于新型溅射真空泵。

项目成果

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N.Takagi：“ATF 冷阴极真空计的特性”，第 20 届日本直线加速器会议论文集。

Y.Funato: "CHARACTERISTICS OF PENNING TYPE DISCHARGE WITH LaB_6 CATHODE FOR SPUTTER ION PUMP" Proc.of 21 the Int.Conf.on Phenomena in Ionized Gases. VOl.11. 317-318 (1993)

Y.Funato：“用于溅射离子泵的 LaB_6 阴极的彭宁型放电的特性”Proc.of 21 the Int.Conf.on Phenomena in ionized Gases。

Y.Funato: "Distributions of Plasma Parameters in a Sputter Discharge" Proc.XXIII.Int.Conf.on Phenomena Ionized Gases,Toulouse(1997). (to be published). (1997)

Y.Funato：“溅射放电中等离子体参数的分布”Proc.XXIII.Int.Conf.on Phenomena Ionized Gases，图卢兹（1997）。

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