System Development for Practical Education of Specialized Subjects, Research and Graduation Thesis Research in a College of Technology
System Development for Practical Education of Specialized Subjects, Research and Graduation Thesis Research in a College of Technology
批准号:
10680207
负责人:
FUNATO Yasuyuki
金额:
$0.7万
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (C)
财政年份:
1998
资助国家:
日本
项目状态:
已结题
起止时间:
1998 至 1999
中文摘要
1. A new type of教育系统是开发和实验设备。the practical education of the subjects in a College of Technology, specialized subjects,research and graduation thesis research,it is important to tech practically the subjects by using real system.2. Electromagnetics,Electric circuits and related subjects are fundamental and important for the students of departments3. We developed the experimental device for measuring the electric andmagnetic fields for these purpose. The system is mainly The device producing a glow plasma andconstituted by measuring4. Parts and computer assemblies. The data acquisition from plasma and itsprocessing也是系统的subjects .5. Plasma experiments are as follows:Properties of NOx gas dynamics during a glow discharge sputtering with LaB6 cold cathode are studiedexperimentally. For the purpose of decomposing NOx gasesboron-compound cathode like an lanthanumLaB6或BN is applied for the cathode material. the application of thesematerials for the cathode is due to the fact that the sputtered Boron is shown experimentally to be6. A disk of 50mm in diameter with 5mm thick of 6. A disk of 50mm in diameter with 5mm thick ofL - D2a - D2B - D26 - D2 is arranged perpendicularly to the cylindrical anode. the anode has a diameterof 100mm and 300 mm in length. in the chamber,一个electro-static probe for measurement of the electron density and plasma potential is arranged.The small sample tip for x-ray photoelectron spectroscopy (XPS) measurement is also installed nearcathode electrode. Dynamics of partial pressures of residual gases are measured by using aquadruple mass analyzer (QMA) during and after the discharge. the experiment show that the glowplasma by using LaB6 electrodes is apparently effective to decompose NOx gases during the sputterdischarge.7. The results been reported and discussed at international conference and foreignuniversities . less
英文摘要
1. A new type of educational system are developed and its experimental device was constructed. For the practical education of the subjects in a College of Technology, specialized subjects, research and graduation thesis research, it is important to tech practically the subjects by using real system.2. Electromagnetics, Electric circuits and related subjects are fundamental and important for the students of departments of electrical engineering.3. We developed the experimental device for measuring the electric and magnetic fields for these purpose. The system is mainly the device producing a glow plasma and constituted by measuring4. Parts and computer assemblies. The data acquisition from plasma and its processing are also the subjects for the system.5. Plasma experiments are as follows : Properties of NOx gas dynamics during a glow discharge sputtering with LaB6 cold cathode are studied experimentally. For the purpose of decomposing NOx gases, boron-compound cathode like an lanthanum … More hexaboride (LaB6) or BN is applied for the cathode material. The application of these materials for the cathode is due to the fact that the sputtered Boron is shown experimentally to be react satisfactorily with oxygen gases.6. A disk of 50mm in diameter with 5mm thick of LィイD2aィエD2BィイD26ィエD2 is arranged perpendicularly to the cylindrical anode. The anode has a diameter of 100 mm and is 300 mm in length. In the chamber, an electro-static probe for measurement of the electron density and plasma potential is arranged. The small sample tip for x-ray photoelectron spectroscopy (XPS) measurement is also installed near the cathode electrode. Dynamics of partial pressures of residual gases are measured by using a quadruple mass analyzer (QMA) during and after the discharge. The experiment show that the glow plasma by using LaB6 electrodes is apparently effective to decompose NOx gases during the sputter discharge.7. The results have been reported and discussed at international conference and foreign universities. Less
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南条徹: "ボロン化合物陰極を用いたN2/O2混合ガスグロー放置プラズマの特性"鈴鹿工業高等専門学校紀要. 33. 63-66 (2000)
Toru Nanjo:“使用硼化合物阴极的 N2/O2 混合气体辉光左等离子体的特性”国立技术研究所通报,铃鹿 33. 63-66 (2000)。
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西ノ坊泰樹、船戸康幸: "RFプラズマスパッタ薄膜生成における電力整合の最適化" 鈴鹿工業高等専門学校紀要. 31. 75-78 (1998)
Yasuki Nishinobo、Yasuyuki Funato:“射频等离子体溅射薄膜生产中功率匹配的优化”国立技术研究所通报,铃鹿市,31. 75-78 (1998)。
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Y. FUNATO: "Studies on Magnetic Field Configuration for Plasma Processing"MEMOIRS of Suzuka National College of Technology. 32. 43-48 (1999)
Y. FUNATO:“等离子体处理的磁场配置研究”铃鹿国立工业大学回忆录。
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清岡千晶: "スパッタ放電のプラズマ密度、電位分布の測定"鈴鹿工業高等専門学校紀要. 31. 65-70 (1998)
Chiaki Kiyooka:“溅射放电的等离子体密度和电势分布的测量”国立技术学院通报,铃鹿31. 65-70 (1998)。
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Y.Funato,et al.: "V-I CHARACTERISTICS OF A SPUTER DISCHARGE WITH BORON-COMPOUND CATHODE" Proc of 14^<th> Europ.Conf.on the Atomic and Molecular Physics of Ionized Gases. August26-29,Ireland. 214-215 (1998)
Y.Funato 等人:“硼化合物阴极溅射放电的 V-I 特性”第 14 次 Europ.Conf.on 电离气体原子和分子物理学的会议记录。
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共 16 条
System Construction and Execution for the expansive upgrading of the practice Education in the College of Technology
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批准号:13680214
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项目类别:Grant-in-Aid for Scientific Research (C)
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资助金额:$2.18万
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财政年份:2001
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负责人:FUNATO Yasuyuki
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依托单位:
Applied Study on Ion Absorption Pump for Oxygen by a Reactive Cathode Sputter Discharge
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批准号:11555008
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项目类别:Grant-in-Aid for Scientific Research (B).
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资助金额:$2.82万
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财政年份:1999
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负责人:FUNATO Yasuyuki
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依托单位:
EXPERIMENTAL STUDY ON SPUTTER ION PUMP FOR WIDE PRESSURE RANGE
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批准号:05555011
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项目类别:Grant-in-Aid for Developmental Scientific Research (B)
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资助金额:$1.47万
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财政年份:1993
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负责人:FUNATO Yasuyuki
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依托单位: