System Development for Practical Education of Specialized Subjects, Research and Graduation Thesis Research in a College of Technology

某工学院专业实践教学、科研及毕业论文研究系统开发

• 批准号: 10680207
• 负责人: FUNATO Yasuyuki
• 金额: $ 0.7万
• 依托单位: Suzuka National College of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10680207/
• 关键词: 電磁気学; 工学実験・卒業研究; 電磁場計測; グロー放電プラズマ; 実践教育; 特別研究; 国際学会; 国際協力; 電離気体現象; 靜伝プローブ測定; TiNコーテイング

1. A new type of educational system are developed and its experimental device was constructed. For the practical education of the subjects in a College of Technology, specialized subjects, research and graduation thesis research, it is important to tech practically the subjects by using real system.2. Electromagnetics, Electric circuits and related subjects are fundamental and important for the students of departments of electrical engineering.3. We developed the experimental device for measuring the electric and magnetic fields for these purpose. The system is mainly the device producing a glow plasma and constituted by measuring4. Parts and computer assemblies. The data acquisition from plasma and its processing are also the subjects for the system.5. Plasma experiments are as follows : Properties of NOx gas dynamics during a glow discharge sputtering with LaB6 cold cathode are studied experimentally. For the purpose of decomposing NOx gases, boron-compound cathode like an lanthanum … More hexaboride (LaB6) or BN is applied for the cathode material. The application of these materials for the cathode is due to the fact that the sputtered Boron is shown experimentally to be react satisfactorily with oxygen gases.6. A disk of 50mm in diameter with 5mm thick of LィイD2aィエD2BィイD26ィエD2 is arranged perpendicularly to the cylindrical anode. The anode has a diameter of 100 mm and is 300 mm in length. In the chamber, an electro-static probe for measurement of the electron density and plasma potential is arranged. The small sample tip for x-ray photoelectron spectroscopy (XPS) measurement is also installed near the cathode electrode. Dynamics of partial pressures of residual gases are measured by using a quadruple mass analyzer (QMA) during and after the discharge. The experiment show that the glow plasma by using LaB6 electrodes is apparently effective to decompose NOx gases during the sputter discharge.7. The results have been reported and discussed at international conference and foreign universities. Less

1.研制了一种新型的教学系统，并建立了相应的实验装置.对于工科院校的学科实践教学、专业课题研究和毕业论文研究来说，运用真实的系统对学科进行实践性的技术改造是非常重要的.电磁学、电路及相关课程是电气工程系学生的重要基础课程.为此，我们研制了测量电场和磁场的实验装置。该系统主要是产生辉光等离子体的装置，由测量4.零件和计算机组件。等离子体数据的采集和处理也是本系统的研究课题.实验研究了LaB_6冷阴极辉光放电溅射过程中NOx气体动力学特性。为了分解NOx气体，硼化合物阴极如镧 ...更多信息 六硼化物（LaB6）或BN被应用于阴极材料。这些材料用于阴极的应用是由于实验表明溅射的硼与氧气反应令人满意。一个直径为50 mm、厚为5 mm的L D2a D2B D26 D2的圆盘垂直于圆柱形阳极布置。阳极的直径为100 mm，长度为300 mm。在腔室中，布置用于测量电子密度和等离子体电势的静电探针。用于X射线光电子能谱（XPS）测量的小样品尖端也安装在阴极电极附近。在放电过程中和放电后，残余气体的分压的动态测量通过使用四重质量分析仪（QMA）。实验表明，在溅射放电过程中，采用LaB6电极的辉光等离子体对分解NOx气体有明显的效果.研究结果已在国际会议和国外大学进行了报告和讨论。少

项目成果

南条徹: "ボロン化合物陰極を用いたN2/O2混合ガスグロー放置プラズマの特性"鈴鹿工業高等専門学校紀要. 33. 63-66 (2000)

Toru Nanjo：“使用硼化合物阴极的 N2/O2 混合气体辉光左等离子体的特性”国立技术研究所通报，铃鹿 33. 63-66 (2000)。

西ノ坊泰樹、船戸康幸: "RFプラズマスパッタ薄膜生成における電力整合の最適化" 鈴鹿工業高等専門学校紀要. 31. 75-78 (1998)

Yasuki Nishinobo、Yasuyuki Funato：“射频等离子体溅射薄膜生产中功率匹配的优化”国立技术研究所通报，铃鹿市，31. 75-78 (1998)。

Y. FUNATO: "Studies on Magnetic Field Configuration for Plasma Processing"MEMOIRS of Suzuka National College of Technology. 32. 43-48 (1999)

Y. FUNATO：“等离子体处理的磁场配置研究”铃鹿国立工业大学回忆录。

清岡千晶: "スパッタ放電のプラズマ密度、電位分布の測定"鈴鹿工業高等専門学校紀要. 31. 65-70 (1998)

Chiaki Kiyooka：“溅射放电的等离子体密度和电势分布的测量”国立技术学院通报，铃鹿31. 65-70 (1998)。

Y.Funato,et al.: "V-I CHARACTERISTICS OF A SPUTER DISCHARGE WITH BORON-COMPOUND CATHODE" Proc of 14^<th> Europ.Conf.on the Atomic and Molecular Physics of Ionized Gases. August26-29,Ireland. 214-215 (1998)

Y.Funato 等人：“硼化合物阴极溅射放电的 V-I 特性”第 14 次 Europ.Conf.on 电离气体原子和分子物理学的会议记录。