Precision Magnetic Bearing with Nanometer Rotational Accuracy

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The aim of the research is to realize a radial magnetic bearing with the rotational accuracy of several nanometers. In this research, a partial bias current method for driving electromagnets is introduced not only to achieve the high rotational accuracy of the spindle, but also to reduce the heat generation of the electromagnets. Furthermore, an angle domain repetitive controller is applied to eliminate the repeatable runouts caused by the unbalance of the spindle. The experimental results show that the partial bias current method has the merits of fine positioning capability, low heat generation of electromagnets and low rotational resistance. The repetitive controller can cancel the unbalance force and achieve the rotational accuracy of 15.1nm at 1500min^<-1>.