Development of an optical measuring method for rotational accuracy of micro-spindle

近年来，信息技术设备、数码相机、微型机械等产品的快速发展，需要大量的微型或微型元器件。另一方面，生产和装配系统的规模远远大于系统生产的组件。为此，有人提出了微型工厂的概念，它由微型机床和机器人组成。微型机床如车床、铣床和电火花加工机床已经发展起来。另一方面，必须发展适应微型工厂需要的新的测量技术，微主轴回转精度的测量方法是微型工厂发展的基础技术之一。例如，切割细轴等小零件需要主轴以非常高的速度运行。以保持最佳的切割速度。目前，最高转速为200，000rpm的微主轴已经得到验证。然而，措施 关于我们 还没有建立高速微主轴的主轴旋转精度的测量方法。在此基础上，尝试发展了一种新的高速微主轴回转精度的光学测量方法。本研究以半导体雷射为光源，四象限二极体为感测元件，在主轴端部加装精密微球透镜或微钢球。安装在微主轴单元的端部的球透镜反射来自激光光源的光，并且根据由象限光电二极管检测的反射光来分析轴的运动。作为这种测量方法的特点，它是很难被电噪声的影响，它可以响应高速旋转等。在这项研究中，光学系统参数和测量灵敏度之间的关系，首先明确，然后确定最佳参数的测量。然后对微型车床主轴进行了测量实验。将测量结果与采用精密平行滚子和电容式位移传感器的传统测量方法的测量结果进行了比较。少

Recent rapid progress in the development of the products such as IT equipments, digital cameras and micro-machines need a lot of micro or miniature components. On the other hand, the size of production and assembly systems are much bigger than the components produced by the systems. To this end, a concept of a micro-factory, which consists of tiny machine tools and robots has been proposed. Micromachine tools such as lathes, milling machines and EDM machines have already been developed. On the other hand, new measurement technologies that meet the need of micro-factory must be developed.Measurement method for rotational accuracy of micro-spindles is one of the basic technologies for the progress of micro-factory. For example, cutting of small parts such as thin shafts, requires that the spindle be run at very high speeds in. order to maintain optimal cutting speeds. At present, a micro-spindle with a maximum rotational speed of 200,000rpm has already been demonstrated. However, measure … More ment methods for spindle rotation accuracy of high-speed micro-spindles have not been established. Then, we have tried to develop a new optical measuring method for rotation accuracy of high-speed micro-spindles. In this study, a precise micro ball lens or micro steel ball is attached to the spindle end.The trial apparatus has a semiconductor laser as light source and a quadrant diode as photo sensor. A ball lens, which is attached at the end of a micro-spindle unit, reflects the light from the laser light source and a motion of an axis is analyzed on the reflected light detected by a quadrant photo diode. As the feature of this measuring method, it is mentioned that it is hard to be influenced of an electric noise, and it can respond to high-speed rotation etc. In this study, the relation between optical system parameters and measurement sensitivity is at first made clear, and then the optimal parameters for measurement are determined. Then measurement experiments were carried out for the spindle of a micro-lathe. The measuring results were compared with the results obtained by conventional measuring method using a precision parallel roller and a capacitive type displacement sensor. Less