Development of an optical measuring method for rotational accuracy of micro-spindle

微主轴旋转精度光学测量方法的研制

• 批准号: 14550106
• 负责人: MITSUI Kimiyuki
• 金额: $ 2.3万
• 依托单位: Keio University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14550106/
• 关键词: Spindle rotation accuracy; Spindle; Micro-machine tools; Micro-factory; Optical measuring method; Quadrant photo diode; マイクロファクトリ; マイクロスピンドル; 光学的測定法; 加工精度

Recent rapid progress in the development of the products such as IT equipments, digital cameras and micro-machines need a lot of micro or miniature components. On the other hand, the size of production and assembly systems are much bigger than the components produced by the systems. To this end, a concept of a micro-factory, which consists of tiny machine tools and robots has been proposed. Micromachine tools such as lathes, milling machines and EDM machines have already been developed. On the other hand, new measurement technologies that meet the need of micro-factory must be developed.Measurement method for rotational accuracy of micro-spindles is one of the basic technologies for the progress of micro-factory. For example, cutting of small parts such as thin shafts, requires that the spindle be run at very high speeds in. order to maintain optimal cutting speeds. At present, a micro-spindle with a maximum rotational speed of 200,000rpm has already been demonstrated. However, measure … More ment methods for spindle rotation accuracy of high-speed micro-spindles have not been established. Then, we have tried to develop a new optical measuring method for rotation accuracy of high-speed micro-spindles. In this study, a precise micro ball lens or micro steel ball is attached to the spindle end.The trial apparatus has a semiconductor laser as light source and a quadrant diode as photo sensor. A ball lens, which is attached at the end of a micro-spindle unit, reflects the light from the laser light source and a motion of an axis is analyzed on the reflected light detected by a quadrant photo diode. As the feature of this measuring method, it is mentioned that it is hard to be influenced of an electric noise, and it can respond to high-speed rotation etc. In this study, the relation between optical system parameters and measurement sensitivity is at first made clear, and then the optimal parameters for measurement are determined. Then measurement experiments were carried out for the spindle of a micro-lathe. The measuring results were compared with the results obtained by conventional measuring method using a precision parallel roller and a capacitive type displacement sensor. Less

近年来，IT设备、数码相机、微型机械等产品的发展日新月异，需要大量的微型或微型元器件。另一方面，生产和组装系统的规模远远大于系统生产的零部件。为此，提出了由微型机床和机器人组成的微型工厂的概念。微型机床，如车床、铣床和电火花加工机床已经开发出来。另一方面，必须开发新的测量技术来满足微工厂的需要。微主轴回转精度的测量方法是微工厂进步的基础技术之一。例如，对细轴等小零件的切割，要求主轴以非常高的速度运行。以保持最佳切割速度。目前，一种最高转速为20万转/分的微主轴已经展示出来。然而，测量…提高高速微主轴回转精度的方法还不多见。在此基础上，尝试开发了一种新的高速微主轴回转精度的光学测量方法。实验装置采用半导体激光器作为光源，象限二极管作为光传感器，在主轴端部安装精密微球透镜或微钢球。安装在微轴单元末端的球镜反射来自激光光源的光，并在象限光电二极管检测到的反射光上分析轴的运动。由于这种测量方法的特点是不易受电噪声的影响，对高速旋转等有较强的响应能力。本研究首先明确了光学系统参数与测量灵敏度的关系，然后确定了测量的最佳参数。然后对微型车床的主轴进行了测量实验。将测量结果与采用精密平行滚子和电容式位移传感器的常规测量方法进行了比较。较少

项目成果

奥山栄樹, 五宝健治, 三井公之: "New analytical method for V-block three-point"Precision Engineering. 27. 234-244 (2003)

Eiki Okuyama、Kenji Goho、Kimiyuki Mitsui：“V 型块三点的新分析方法”精密工程 27. 234-244 (2003)。

E.Okuyama, K.Goho, K.Mitsui: "New analitical method for V-block three-point method"Precision Engineering. Vol.27. 234-244 (2003)

E.Okuyama，K.Goho，K.Mitsui：“V型块三点法的新分析方法”精密工程。

奥山栄樹, 五宝健治, 三井公之: "New analytical method for V-block three-point method"Precision Engineering. 27. 234-244 (2003)

Eiki Okuyama、Kenji Goho、Kimiyuki Mitsui：“V 型块三点法的新分析方法” 精密工程 27. 234-244 (2003)。