Development of interface nano-fabrication technique by STM tip for quantum-wave interference devices

量子波干涉器件STM针尖界面纳米加工技术的发展

• 批准号: 11555082
• 负责人: WATANABE Yosuke
• 金额: $ 8.9万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1999
• 资助国家: 日本
• 起止时间: 1999 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-11555082/
• 关键词: BEEM; STM; micro-fabrication; nano-scale; Au; memory; thin films; 走査トンネル顕微鏡; バリスティック電子放射顕微鏡; 界面微細加工

We have been developing STM and various surface science techniques based on STM for electrical properties on crystal surfaces. The studies range from atomic scale surface structure determination to electronic properties such as surface electronic state, electrical transport properties, capacitance, and work functions. The physics range from nanometer-scale to atomic scale and have reveled a diversity of rich phenomena that takes place on the crystal surfaces. In the present project, we have extended our studies to a nano-scale fabrication at the interfaces of thinfilm-substrate systems. By use of focused tunneling electron beam, we have succeeded to fabricate a nano-sized memory by controlling the interface transmission probability at the interface between Au nano-granular film on Si(111). The size of each memory device was around 10nm which is limited by the size of each grains in the film and can be downsized to have higher density and higher capacity of the memory device. The results obtained here will be useful for developing novel memory devises in nanometer scale.

我们一直在开发扫描隧道显微镜和基于扫描隧道显微镜的各种表面科学技术，用于晶体表面的电学性质。研究范围从原子尺度的表面结构确定到电子性质，如表面电子态、电输运性质、电容和功函数。物理范围从纳米尺度到原子尺度，揭示了发生在晶体表面的各种丰富的现象。在本项目中，我们将我们的研究扩展到了薄膜-衬底系统界面上的纳米级制造。利用聚焦隧穿电子束，通过控制Au纳米颗粒薄膜在Si(111)上的界面传输几率，成功地制备了纳米级存储器。每个存储器件的尺寸约为10 nm，这受到薄膜中每个颗粒的尺寸的限制，并且可以减小尺寸以具有更高的密度和更高的存储器件的容量。所得结果将为发展纳米尺度的新型存储器件提供参考。

项目成果

T. Suzuki et al.: "Electron standing-wave observation in the Pd overlayer on Au(111) and Cu(111) surfaces by scanning tunneling microsco"Phisical Review B. 64. 081403R1-4 (2001)

T. Suzuki 等人：“通过扫描隧道显微镜在 Au(111) 和 Cu(111) 表面上的 Pd 覆盖层中进行电子驻波观察”Physical Review B. 64. 081403R1-4 (2001)

Y. Hasegawa et al.: "Highlights of the recent literature"Science. 287. 12 (2000)

Y. Hasekawa 等：“近期文学亮点”科学。

鈴木 隆将: "Electron standing-wave observation in the Pd overlayer on Au(111) and Cu(111) surfaces by scanning tunneling microsco"Phisical Review B. 64. 081403R1-081403R4 (2001)

Takamasa Suzuki：“通过扫描隧道显微镜对 Au(111) 和 Cu(111) 表面上的 Pd 覆盖层进行电子驻波观察”Physical Review B. 64. 081403R1-081403R4 (2001)

Y. Hasegawa et al.: "Erasable nanometer-scale modification at the Au/Si interface by ballistic electron emission microscopy"Appl. Pys. Lett.. 75. 3668 (1999)

Y. Hasekawa 等人：“通过弹道电子发射显微镜在 Au/Si 界面进行可擦除纳米级修饰”Appl。

Y.Hasegawa: "Erasable nanometer-scale modification at the Au/Si interface by ballistic electron emission microscopy"Appl. Phys. Lett.. 75. 3668-3670 (1999)

Y.Hasekawa：“通过弹道电子发射显微镜在 Au/Si 界面进行可擦除纳米级修饰”Appl。