Study on nanoscale chemical reactions and reaction sites using quantum beams

在半导体器件的大批量生产线上，通过昂贵的高质量量子束和廉价的低质量热能的结合，实现了高分辨率和高通量制造。在这项研究中，利用最先进的量子光束，如电子束、激光、极紫外（EUV）辐射和x射线，研究了纳米尺度的化学反应和反应位点。在此基础上，开发了蒙特卡罗仿真代码。

In the high-volume production lines of semiconductor devices, high-resolution and high-throughput manufacturing has been achieved through the combination of expensive high-quality quantum beam and inexpensive low-quality thermal energy. In this study, nanoscale chemical reactions and reaction sites were investigated by using state-of-the-art quantum beams such as electron beam, laser, extreme ultraviolet (EUV) radiation, and X-ray. On the basis of the obtained knowledge, Monte Carlo simulation code was developed.