Development of Ceramics Than Films Preparation Equipment by Electrostatic Spray Deposition Method and Composition and Morphology Control of Prepared Thin Films

采用静电喷雾沉积技术（EDS）研究了LiCoO_2和羟基磷灰石薄膜的沉积。将醋酸锂和醋酸钴溶于50mol%乙醇和50mol%丁基卡必醇的混合溶液中制备LiCoC_2薄膜。此外，将硝酸钙和磷酸溶解在10体积%乙醇和90体积%丁基卡必醇的混合物中用于制备羟基磷灰石薄膜。利用扫描电子显微镜（SEM）研究了沉积温度、料液浓度和沉积时间等工艺条件对薄膜表面形貌和微观结构的影响。在不同的工艺条件下，制备的LiCoO_2薄膜具有不同的表面结构，如网状结构、分形结构和褶皱结构，而所有的样品都具有分形结构，适合于制备羟基磷灰石薄膜。在所用的沉积温度（200℃）下，沉积的LiCoC_2和羟基磷灰石薄膜为非晶或纳米晶。然后分别在700℃保温1h和900℃保温2h，用X射线衍射仪（XRD）对样品进行了分析。样品的晶体结构转变为所需的相。

The deposition of thin LiCoO_2 and hydroxyapatite layers was studied using the electrostatic spray deposition (EDS) technique. Lithium and cobalt acetate were dissolved in a mixture of 50 mol% ethanol and 50 mol% butyl carbitol for the preparation of LiCoC_2 thin films. Also, Calcium nitrate and phosphoric acid were dissolved in a mixture of 10 vol% ethanol and 90vol% butyl carbitol for the preparation of hydroxyapatite thin films. The effect of process condition such as deposition temperature, concentration of feed solution and deposition time on the surface morphology and microstructure of thin films were examined with scanning electron microscopy (SEM). For the deposited LiCoO_2 layers, various surface structure, such as reticular, fractal or fold one, was fabricated at various process conditions, while all the samples have a fractal structure for the preparation of hydroxyapatite layers. The deposited thin-film LiCoC_2 and hydroxyapatite, were amorphous or nanocrystalline at the used deposition temperature(200℃). Subsequently, the samples were heated at 700℃ for 1h or 900℃ for 2h, respectively and were studied using X-ray diffractometry(XRD). The crystal structure of samples transformed to the desired phase.