Research on the Nanolaboratory for the consruction of new nanodeviees

1. 研制了透射电子显微镜（TEM; Hitachi, H-800）内超小型纳米机器人机械臂，提出了扫描电子显微镜（SEM； JEOL, JSM6500F）内TEM样品制备方法。我们还在TEM （JEOL, JEM-2100）内实验构建了一个超小型纳米机器人，用PC机控制整个系统，用CCD相机观察，并用能量色散x射线能谱仪（EDS）分析其元素性质。基于纳米实验室的制备/薄膜沉积我们对单碳纳米管（CNT）的电子束诱导沉积（EBID）薄膜进行了EDS元素分析。以W(CO)_6为前驱体，制备的导电镀层钨的质量纯度高达98%。研究还发现，用二氧化钌修饰碳纳米管发射极后，其场发射电压降低了约20%。采用可伸缩多壁碳纳米管，在纳米实验室原位制备了部分剥离外层的纳米轴承单元。利用TEM.4的高分辨率和透射图像进行了原位实验，揭示了伸缩纳米管的滑动运动依赖于外加电场。通过检测单根碳纳米管的发射电流、可伸缩纳米管外层和内层之间的电阻变化以及单根碳纳米管与衬底之间的滑动电阻变化，提出了一种新型的距离纳米传感器，并对其进行了评价。

1. Development of ultra-small nanorobotic manipulatorWe developed an ultra-small nanorobotic manipulator inside a transmission electron microscope (TEM ; Hitachi, H-800) and proposed a TEM sample preparation method inside a scanning electron microscope (SEM ; JEOL, JSM6500F). We also experimentally constructed an ultra-small nanorobotic inside a TEM (JEOL, JEM-2100) to control of the whole system by PC, observe by CCD camera, and analyze the elemental property by energy-dispersive X-ray spectroscopy (EDS).2. Fabrication/ Film deposition based on NanolaboratoryWe have done the EDS elemental analysis of the deposited thin film by electron-beam-induced deposition (EBID) of single carbon nanotube (CNT). Using W(CO)_6 as precursor, the conductive deposition had high purity of tungsten as 98% by mass. It was also revealed that the field emission voltage was reduced approximately 20% by the CNT emitter modified with ruthenium dioxide (RuO_2).3. Manipulation/Assembly based on NanolaboratoryIn situ fabrication of nanobearing unit with a telescoping multi-walled CNT, which is partially peeled off outer layers, has been done. In situ experiments revealed a detail process with high-resolution and transmission image of TEM.4 Measurement/Evaluation based on NanolaboratoryWe revealed the sliding motions of the telescoping nanotube depended on the applied external electric field. A new type distance nano-sensor was also proposed and evaluated by detecting the emission current of single CNT, the resistance change between outer and inner layers of telescoping nanotube, and the sliding resistance change between single CNT and substrate.