Research on the Nanolaboratory for the consruction of new nanodeviees

点击翻译按钮获取中文摘要

1. Development of ultra-small nanorobotic manipulatorWe developed an ultra-small nanorobotic manipulator inside a transmission electron microscope (TEM ; Hitachi, H-800) and proposed a TEM sample preparation method inside a scanning electron microscope (SEM ; JEOL, JSM6500F). We also experimentally constructed an ultra-small nanorobotic inside a TEM (JEOL, JEM-2100) to control of the whole system by PC, observe by CCD camera, and analyze the elemental property by energy-dispersive X-ray spectroscopy (EDS).2. Fabrication/ Film deposition based on NanolaboratoryWe have done the EDS elemental analysis of the deposited thin film by electron-beam-induced deposition (EBID) of single carbon nanotube (CNT). Using W(CO)_6 as precursor, the conductive deposition had high purity of tungsten as 98% by mass. It was also revealed that the field emission voltage was reduced approximately 20% by the CNT emitter modified with ruthenium dioxide (RuO_2).3. Manipulation/Assembly based on NanolaboratoryIn situ fabrication of nanobearing unit with a telescoping multi-walled CNT, which is partially peeled off outer layers, has been done. In situ experiments revealed a detail process with high-resolution and transmission image of TEM.4 Measurement/Evaluation based on NanolaboratoryWe revealed the sliding motions of the telescoping nanotube depended on the applied external electric field. A new type distance nano-sensor was also proposed and evaluated by detecting the emission current of single CNT, the resistance change between outer and inner layers of telescoping nanotube, and the sliding resistance change between single CNT and substrate.