Fabrication of functhinal cermic devices using biomimetic processes

我们成功地在SAMs （自组装单体）上制造了钛二氧化物薄膜的微粒子。OTS的SAMs（octadecyltrichloro-silane）是在硅晶圆上形成的，并通过紫外线辐射进行了修改，使用光掩膜生成甲基/硅醇图案。They were used as templates to deposit titanium dioxide thin films by the use of TDD （titanium dichloride diethoxide）。无定形TiO 2电影被选择地存放在硅醇地区。一部被存放的电影的模式的线宽度变化被改进，以改善电子设计规则以下的情况，为5%。Furthermore，模式OTS-SAM保持在一个空气密集型集装箱中，在N2大气层下90 ° C的TDD解决方案。TiO 2被存放在硅醇地区，选择性地和微型地沉积在TiO 2薄膜薄膜上，是从一个潮湿的阶段制造出来的。我们成功地在低温度（55 ° C）制造了ZnO微原子，在那里显示了模式的阴极发光图像。一个带有苯基/OH表面功能组的照片模式、自组装单体（SAM）已作为模板使用。ZnO的选择性、无电沉积物被安装在一个Pd催化剂上，因为它已被移植到仅表面上。羟基磷灰石的微电池也成功地被制造出来，其用途是充电羟基磷灰石微颗粒的站点选择性粘合剂（阴性），在一个超饱和的解决方案上均匀地形成并通过自组装单体修改了充电表面（阳性：NH 2-SAM;阴性：OH-SAM）。在进一步生长的微粒子之后，一个密集的羟基磷灰石薄膜只在积极的NH_2-SAM上形成。

We succeeded in fabricating micropatterns of titanium dioxide thin films on SAMs (self-assembled monolayers). SAMs of OTS (octadecyltrichloro-silane) were formed on Si wafers, and were modified by UV irradiation using a photomask to generate methyl / silanol-pattern. They were used as templates to deposit titanium dioxide thin films by the use of TDD (titanium dichloride diethoxide). Amorphous TiO2 films were selectively deposited on silanol regions. Line width variation of the-pattern of an as-deposited film was improved to be well below the electronics design rule, 5 %. Furthermore, Patterned OTS-SAM was kept in a air tight container with TDD solution under N2 atmosphere at 90゜C for 2 h. TiO2 was deposited on silanol regions selectively and micropattern of TiO2 thin film was thus fabricated from a gaseous phase. We have succeeded in low- temperature (55゜C) fabrication of ZnO micropatterns, which show patterned cathodoluminescence images. A photo-patterned, self-assembled monolayer (SAM) with phenyl/OH-surface functional groups was used as the template. The selective, electroless deposition of ZnO was achieved on a Pd catalyst that had been adhered to the phenyl-surfaces only. The micropattern of hydroxyapatite has also been successfully fabricated by the use of site-selective adhesion of the charged hydroxyapatite microparticles (negative) homogeneously formed in a supersaturated solution onto the charged surfaces modified with self-assembled monolayers (positive : NH2-SAM ; negative :OH-SAM). After a further growth of microparticles a dense of hydroxyapatite thin film was formed only on the positive NH_2-SAM.