Fabrication of functhinal cermic devices using biomimetic processes

使用仿生工艺制造功能陶瓷器件

• 批准号: 12450350
• 负责人: KOUMOTO Kunihito
• 金额: $ 9.28万
• 依托单位: Nagoya University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2001
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-12450350/
• 关键词: self-assmbled monolayers; site-selective deposition; thin film; micropatterning; titanium; zihc oxide; hydroxyapatite; zirconium oxide; 選択析出; TiO2; チタンアルコキシド; 分子認識; マイクロデバイス

We succeeded in fabricating micropatterns of titanium dioxide thin films on SAMs (self-assembled monolayers). SAMs of OTS (octadecyltrichloro-silane) were formed on Si wafers, and were modified by UV irradiation using a photomask to generate methyl / silanol-pattern. They were used as templates to deposit titanium dioxide thin films by the use of TDD (titanium dichloride diethoxide). Amorphous TiO2 films were selectively deposited on silanol regions. Line width variation of the-pattern of an as-deposited film was improved to be well below the electronics design rule, 5 %. Furthermore, Patterned OTS-SAM was kept in a air tight container with TDD solution under N2 atmosphere at 90゜C for 2 h. TiO2 was deposited on silanol regions selectively and micropattern of TiO2 thin film was thus fabricated from a gaseous phase. We have succeeded in low- temperature (55゜C) fabrication of ZnO micropatterns, which show patterned cathodoluminescence images. A photo-patterned, self-assembled monolayer (SAM) with phenyl/OH-surface functional groups was used as the template. The selective, electroless deposition of ZnO was achieved on a Pd catalyst that had been adhered to the phenyl-surfaces only. The micropattern of hydroxyapatite has also been successfully fabricated by the use of site-selective adhesion of the charged hydroxyapatite microparticles (negative) homogeneously formed in a supersaturated solution onto the charged surfaces modified with self-assembled monolayers (positive : NH2-SAM ; negative :OH-SAM). After a further growth of microparticles a dense of hydroxyapatite thin film was formed only on the positive NH_2-SAM.

我们成功地在自组装单层膜上制备了二氧化钛薄膜的微图案。在硅晶片上形成了十八烷基三氯硅烷（OTS）的SAMs，并利用光掩膜进行紫外辐照改性，得到甲基/硅醇模式。利用TDD（二氯化二氧化钛）作为模板沉积二氧化钛薄膜。在硅醇区选择性地沉积了非晶态TiO2薄膜。沉积薄膜图案的线宽变化被改善到远低于电子设计规则的5%。此外，将图案化的OTS-SAM与TDD溶液一起放在密闭容器中，在90℃的N2气氛下保存2小时。TiO2选择性地沉积在硅醇区，从而从气相制备TiO2薄膜的微图案。我们已经成功地在低温（55 C）制造了ZnO微图案，其显示出图案化的阴极发光图像。采用具有苯基/羟基表面官能团的自组装单分子膜（SAM）作为模板。在只粘附在苯基表面的钯催化剂上，实现了ZnO的选择性化学沉积。通过在过饱和溶液中均匀形成的带电羟基磷灰石微粒（负极）与自组装单层修饰的带电表面（正极：NH2-SAM；负极：OH-SAM）的位点选择性粘附，羟基磷灰石的微图案也被成功地制备出来。微粒进一步生长后，仅在正NH_2-SAM上形成致密的羟基磷灰石薄膜。