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Development of Novel Materials Assembling Method Based on Nano-space Chemical Reactions

基于纳米空间化学反应的新型材料组装方法的发展

基本信息

批准号：
09305044
负责人：
KOUMOTO Kunihito
金额：
$ 24.96万
依托单位：
Nagoya University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1999
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09305044/
关键词：
Ceramics Thin Film Micropatterning Self-Assembled Monolayer Fine Particle Arrangement Titanium Dioxide Silica Silica Self-assembled monolayer Hydrophilic Hydrophobic Liquid Phase Deposition Patterning Dielectrics Langmuir-Blo

项目摘要

We have succeeded in fabricating micropatterned TiOィイD22ィエD2 films on self-assembled monolayers (SAM) of phenyltrichlorosilane (PTCS) through the precipitation from an aqueous solution containing TiFィイD26ィエD2ィイD12-ィエD1 ions. A PTCS monolayers was first formed on a silicon water and UV light was irradiated onto the masked monolayer to obtain the SAM with two-dimensionally patterned hydrophilic/hydrophobic surfaces. This patterned substrate was immersed in an aqueous solution to directly deposit TiOィイD22ィエD2 (anatase). Sonication treatment after the deposition resulted in a micropatterned TiOィイD22ィエD2 thin film.We also succeeded in fabricating micropatterns of titanium dioxide thin films on SAMs. SAMs of OTS (octadecyltrichloro-silane) were formed on Si wafers, and were modified by UV irradiation using a photomask to generate methyl/silanol-pattern. They were used as templates to deposit titanium dioxide thin films by the use of TDD (titanium dichloride diethoxide). Amorphous films with approximate compositions Ti : O : Cl : C = 1 : 2.2 : 0.17 : 0.37 were selectively deposited on silanol regions. Line width variation of the pattern of an as-deposited film was improved to be well below the electronics design rule, 5%.Novel processes to arrange fine silica spheres two-dimensionally on SAMs were developed. SiOィイD22ィエD2 sphere surfaces were modified to have CN groups by the use of trichlorocyanoethysilane, and CN groups were oxidized to COOH groups with t-BuOK. A SAM of PTCS with a phenyl/silanol-group pattern was used as a template to arrange fine SiOィイD22ィエD2 spheres. SiOィイD22ィエD2 spheres were selectively attached to silanol surfaces possibly forming ester bonds, which enabled the fabrication of micropatterned arrangement of SiOィイD22ィエD2 spheres.

采用沉淀法在苯基三氯硅烷（PTCS）自组装膜（SAM）上成功地制备了微图案化的TiO_2 O_2薄膜。首先在硅基底上形成PTCS单分子膜，然后将紫外光照射到掩蔽的单分子膜上，以获得具有二维图案化的亲水/疏水表面的SAM。将该图案化基板浸渍在水溶液中，直接存款TiO ↓ [2] O ↓ [2] D ↓ [2]（B）。沉积后的超声处理产生了微图案化的TiOイD22 D2薄膜。我们还成功地在自组装膜上制备了二氧化钛薄膜的微图案。OTS（十八烷基三氯硅烷）的自组装膜形成在Si晶片上，并通过使用光掩模的UV照射进行改性，以产生甲基/硅烷醇图案。将它们用作模板，通过使用TDD（二氯化二乙醇钛）来存款二氧化钛薄膜。在硅醇区选择性沉积了Ti：O：Cl：C = 1：2.2：0.17：0.37的非晶薄膜。在此基础上，提出了一种在自组装膜上二维排列二氧化硅微球的新工艺。用三氯氰乙基硅烷对SiO_2 O_2球表面进行了CN改性，并用叔丁基OK将CN氧化成COOH基团。使用具有苯基/硅烷醇基团图案的PTCS的SAM作为模板来排列精细的SiO_2D_2D_2球。将SiO_2 O_2D_2D_2球选择性地附着到可能形成酯键的硅烷醇表面，这使得能够制造SiO_2 O_2D_2D_2球的微图案化排列。