DEVELOPMENT OF GRAZING-EXIT MICRO X-RAY FLUORESCENCE INSTRUMENT AND SINGLE PARTICLE ANALYSIS SUCH AS AEROSOLS

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We have studied EPMA under grazing-exit conditions, which is called GE-EPMA. We developed a GE-EPMA apparatus based on a commericial EPMA. We evaluated the analytical characterization of GE-EPMA. It was foue analysis and single-particle analysis are possible by GE-EPMA with extremely low background. By analyzing exit-angle dependence of EPMA intensity, we can evaluate thickness and density of him films. The advantage of GE-EPMA is the use of an electron beam with a small diameter at an incident angle of 90 degrees, which makes it possible to perform localized analysis. Element mapping is possible by scanning the electron beam or the sample stage. In addition, depth analysis is possible by varying the exit angle, which could finally result in 3-dimensional EPMA