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Development of the glancing-incidence and glancing-takeoff X-ray fluorescence apparatus for surface an analysis

用于表面分析的掠入射和掠起飞X射线荧光仪的研制

基本信息

批准号：
07555260
负责人：
TSUJI Kouichi
金额：
$ 7.42万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

项目摘要

A glancing-incidence and glancing-takeoff x-ray analytical apparatus was developed in cooperation with researchers of companies. This apparatus have a monocrometer of W/C multilayr. Both the incident angle (phi) of the primary x-rays and the takeoff angle (chi) of the fluorescent x-rays are controlled around the critical angles of total reflection (several mrad) with precise goniometers. Moreover, the azimuth angle between the incident x-ray beam and the detected fluorescent x-ray beam can be changed with a 2rheta circle stage, and rotation of the sample stage is also possible with a rheta circle stage. The 4 stages (phi, chi, rheta, 2rheta) are stePPing-motor-controlled by a computer, which also measures the x-ray spectra. Therefore, the angle scan of the fluorescent x-ray intensity is automatically measured.We performed a surface analysis of various materials by using this apparatus. The obtained results were reported in about 20 papers of international Journals, and were orally presented at scientific societies including twice international meeting. Especially, the determination of the solid surface density and the evaluation of the x-ray probing depth under total reflection conditions are good results. The head investigator (K.Tsuji) is given two prizes for encouragement from The Surface Science Society of Japan and The Japan Society of Applied Physics. I attempt to apply the glancing-incidence and glancing-takeoff x-ray fluorescence method to monitoring the plasma processing.In addition to these results, we also studied the x-ray excited STM tip current and the x-ray emission from a Grimm glow discharge lamp for the first time.

与公司研究人员合作开发了一种掠入射和掠起飞X射线分析仪。该仪器具有W/C多层单色仪。初级X射线的入射角（phi）和荧光X射线的出射角（chi）都用精确的测角仪控制在全反射的临界角（几mrad）附近。此外，入射X射线束和检测到的荧光X射线束之间的方位角可以用2 rheta圆载物台改变，并且样品载物台的旋转也可以用rheta圆载物台。4个阶段（phi，chi，rheta，2 rheta）是由计算机控制的步进电机，该计算机还测量X射线光谱。因此，荧光X射线强度的角度扫描是自动测量的。我们使用该装置进行了各种材料的表面分析。所获得的结果在国际期刊上发表了约20篇论文，并在科学协会包括两次国际会议上进行了口头报告。特别是在全反射条件下，固体表面密度的测定和X射线探测深度的评估是很好的结果。首席研究员（K.Tsuji）获得了日本表面科学学会和日本应用物理学会的两项鼓励奖。本文尝试将掠入射和掠出的X射线荧光方法应用于等离子体过程的监测，并首次研究了X射线激发的STM针尖电流和Grimm辉光放电灯的X射线发射。