Development of 3-D DX-ray Analytical Microscope and micro-nano analysis under actual environment

采用多毛细x射线透镜，研制了微型xrf仪器。这种多毛细x射线透镜使我们能够制造出大约几十微米的微x射线束，从而进行微区域的元素分析。利用该仪器进行了以下研究：1)变化面积的元素x射线成像多毛细透镜获得的光斑大小主要取决于与透镜输出端的距离。因此，可以通过改变距镜头的距离来改变光斑的大小。因此，我们提出可以用大的斑点尺寸来测量大面积，用小的斑点尺寸来测量小面积。2)藜麦种子的元素制图xrf具有独特的优势：在环境空气压力下（即不需要高真空条件下）进行非破坏性元素分析。由于活样不能在真空条件下安装，这一优点对活样的分析非常有帮助。因此，我们在环境气压下拍摄了藜麦种子生长过程中的x射线元素图。将种子放在样品架上的棉花上，样品架的一端放入水箱中；因此，在x射线测量期间，种子可以生长。结果发现，在生长过程中，K从种子转移到茎中，而Ca仍留在种子中。3)微型XRF与原子力显微镜（AFMAFM）相结合，使我们能够在原子水平上观察表面形貌；然而，化学信息的获取，即元素的区分是困难的。因此，原子力显微镜与x射线荧光显微镜的结合是非常有吸引力的。实际上，我们证明了组合仪器工作良好。4)三维XRF仪器制备了两个多毛透镜用于激发和检测。通过在一个位置精确地调整两个透镜的焦点，可以分析三维空间中的一个小区域。我们已经研究了这种技术。

By using a polycapillary x-ray lens, micro-XRF instrument was developed. This polycapillary x-ray lens enables us make a micro x-ray beam of about several tens micro meters, leading to elemental analysis of micro region. Using this instrument, following research subjects were studied :1) Elemental x-ray mapping with changeable areaThe spot size obtained by polycapillary lens critically depends on distance from the output end of the lens. Therefore, it is possible to change the spot size by changing the distance from the lens. Thus, we proposed that a large area could be measured a large spot size, while a small area could be measured by a small spot size. BY using this technique, a total measuring time could be reduce,2) Elemental mapping of quinoa seedXRF has unique advantages : non-destructive elemental analysis at ambient air pressure (that is, high vacuum conditions are not required). This advantages are very helpful for analysis of living sample, because the living sample cannot be installed in vacuum condition. Thus, we took the x-ray elemental maps for quinoa seed at ambient air pressure during growth. The seed was put on the cotton on the sample holder, whose end was put into the water tank ; therefore, the seed could grow up during the x-ray measurement. As a result, it was found that K moved from the seed to stem, while Ca still remained in the seed during the growth.3) Combination of micro XRF with AFMAFM (atomic force microscope) enables us take surface morphology with atomic level ; however, it is difficult to take chemical information, that is, distinguish of elements. Therefore, it is very attractive to combine AFM and XRF. Actually, we demonstrated that the combined instrument worked well.4) 3-D XRF instrumentWe prepared two polycapillalry lens for excitation and detection. By adjusting the focusing points of two lens exactly at one position, it is possible to analyze a small region in 3 dimensional space. We have investigated this technique.