Development of Two Beam Total-Reflection X-Ray Fluorescence and its evaluation of Analytical Performance

我对先前拨款（a, 07555260）研制的大型测角仪进行了改进，研制了新的设备“2束x射线激发全反射x射线荧光（TXRF）”。该测角仪放置在阳极旋转型x射线发生器的工作台上（Rigaku, RU-200）。通过倾斜测角仪的一个轴（φ）来改变x射线发生器的x射线入射角。在测角仪的另一个臂上安装了一个密封式x射线管。通过移动该臂改变了封闭式x射线管的入射角（χ）。利用该系统，可以对两束独立控制入射角的x射线进行TXRF分析。由于长期在比利时和英国工作，我用了1年半的时间才开发出上述专用设备。因此，项目期限不足以完成所提出方法的评价。然而，证实了两次x射线束照射增强了x射线荧光强度。我将继续研究这种方法的分析性能。在本项目期间，还提出了另一种方法：“掠射出口电子探针微分析（GE-EPMA）”。这种方法使表面敏感微量分析成为可能。GE-EPMA用于颗粒分析和薄膜分析。用这种方法得到的部分结果被收录在本项目的报告手册中。

I developed a new equipment "2 x-ray beams excitation total reflection x-ray fluorescence (TXRF)" by modified the large goniometer that was developed by previous grant (A, 07555260). This goniometer was placed on the table of an x-ray generator of anode-rotating type (Rigaku, RU-200). The incident angle of the x-rays from this x-ray generator was changed by tilting one axis (φ) of the goniometer. A sealed-type x-ray tube was attached on another arm of the goniometer. The incident angle (χ) of the sealed-type x-ray tube was changed by moving this arm. By using this system, TXRF analysis was possible with two different x-ray beams, whose incident angle were independently controlled. Due to my long stay in Belgium and England, it took 1 year and a half to develop the above special equipment. Therefore, the term of project was not enough to finish the evaluation of the proposed method. However, it was confirmed that x-ray fluorescent intensity was enhanced by two x-ray beams irradiation. I will continuously investigate the analytical performance of this method.During the term of this project, another method : "grazing-exit electron probe microanalysis (GE-EPMA)" was also proposed. This method enables surface-sensitive microanalysis. GE-EPMA was applied to particle analysis and thin-film analysis. The parts of the results obtained by this method were included in the report booklet of this project.