Development of Two Beam Total-Reflection X-Ray Fluorescence and its evaluation of Analytical Performance

我对前人研制的大测角仪(A，07555260)进行了改进，研制出了一种新的设备--2x射线激发全反射x射线荧光仪。该测角仪被放置在Rigaku，RU-200阳极式X射线发生器的工作台上。通过倾斜测角仪的一个轴(φ)来改变来自该X射线发生器的X射线的入射角。在测角仪的另一臂上安装了一根密封式X射线管。通过移动该臂，改变了密封式X射线管的入射角(χ)。利用该系统，可以对两束独立控制入射角度的X射线束进行TXRF分析。由于我在比利时和英国呆了很长时间，我花了一年半的时间才研制出上述特种设备。因此，项目工期不足以完成对该方法的评估。然而，证实了X射线荧光强度在两束X射线照射下得到了增强。我将继续研究该方法的分析性能。在本项目期间，还提出了另一种方法：掠射-出射电子探针微量分析(GE-EPMA)。这种方法使表面敏感的微量分析成为可能。将Ge-EPMA用于颗粒分析和薄膜分析。用这种方法取得的部分成果载于该项目的报告小册子。

I developed a new equipment "2 x-ray beams excitation total reflection x-ray fluorescence (TXRF)" by modified the large goniometer that was developed by previous grant (A, 07555260). This goniometer was placed on the table of an x-ray generator of anode-rotating type (Rigaku, RU-200). The incident angle of the x-rays from this x-ray generator was changed by tilting one axis (φ) of the goniometer. A sealed-type x-ray tube was attached on another arm of the goniometer. The incident angle (χ) of the sealed-type x-ray tube was changed by moving this arm. By using this system, TXRF analysis was possible with two different x-ray beams, whose incident angle were independently controlled. Due to my long stay in Belgium and England, it took 1 year and a half to develop the above special equipment. Therefore, the term of project was not enough to finish the evaluation of the proposed method. However, it was confirmed that x-ray fluorescent intensity was enhanced by two x-ray beams irradiation. I will continuously investigate the analytical performance of this method.During the term of this project, another method : "grazing-exit electron probe microanalysis (GE-EPMA)" was also proposed. This method enables surface-sensitive microanalysis. GE-EPMA was applied to particle analysis and thin-film analysis. The parts of the results obtained by this method were included in the report booklet of this project.