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Development of Two Beam Total-Reflection X-Ray Fluorescence and its evaluation of Analytical Performance

两束全反射X射线荧光分析仪的研制及其分析性能评价

基本信息

批准号：
11650828
负责人：
TSUJI Kouichi
金额：
$ 2.37万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2000
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-11650828/
关键词：
X-Ray Fluorescence Total Reflection Surface analysis Thin-fim Analysis Non-destructive Analysis

项目摘要

I developed a new equipment "2 x-ray beams excitation total reflection x-ray fluorescence (TXRF)" by modified the large goniometer that was developed by previous grant (A, 07555260). This goniometer was placed on the table of an x-ray generator of anode-rotating type (Rigaku, RU-200). The incident angle of the x-rays from this x-ray generator was changed by tilting one axis (φ) of the goniometer. A sealed-type x-ray tube was attached on another arm of the goniometer. The incident angle (χ) of the sealed-type x-ray tube was changed by moving this arm. By using this system, TXRF analysis was possible with two different x-ray beams, whose incident angle were independently controlled. Due to my long stay in Belgium and England, it took 1 year and a half to develop the above special equipment. Therefore, the term of project was not enough to finish the evaluation of the proposed method. However, it was confirmed that x-ray fluorescent intensity was enhanced by two x-ray beams irradiation. I will continuously investigate the analytical performance of this method.During the term of this project, another method : "grazing-exit electron probe microanalysis (GE-EPMA)" was also proposed. This method enables surface-sensitive microanalysis. GE-EPMA was applied to particle analysis and thin-film analysis. The parts of the results obtained by this method were included in the report booklet of this project.

在原大型测角仪（A，07555260）的基础上进行改进，研制了一种新的仪器“双X射线激发全反射X射线荧光（TXRF）”。将该测角仪放置在阳极旋转型X射线发生器（Rigaku，RU-200）的工作台上。通过倾斜测角仪的一个轴（φ）来改变来自该X射线发生器的X射线的入射角。将密封型X射线管连接到测角仪的另一个臂上。通过移动该臂改变密封型X射线管的入射角（χ），实现了对两束不同入射角的X射线进行TXRF分析。由于我在比利时和英国呆了很长时间，我花了一年半的时间来开发上述专用设备。因此，项目期限不足以完成对所提出方法的评价。然而，证实了X射线荧光强度通过两个X射线束照射而增强。在本计画期间，另一种分析方法“掠出射电子探针微区分析法”（GE-EPMA）也被提出。这种方法可以进行表面敏感的微量分析。GE-EPMA用于颗粒分析和薄膜分析。用该方法得到的部分结果已收入本项目的报告书。