Development Research of an In-Parallel Actuated Robot with Redundant Actuators for Grass and Fine Motions

具有冗余执行器的草并精细运动并联驱动机器人的开发研究

• 批准号: 12555039
• 负责人: TAKEDA Yukio
• 金额: $ 6.98万
• 依托单位: TOKYO INSTITUTE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-12555039/
• 关键词: Robotics; In-Parallel Actuated Mechanism; Fine Positioning; Redundant Manipulator; Gross and Fine Drive; Kinematic Synthesis; Rolling Spherical Bearing; 機構学; 粗微動駆動系; 機械要素; 高精度位置決め; ハイブリッド機構; 粗微動機構; 作業領域

In many applications of multi-degree-of-freedom mechanisms as positioning devices, a large working space and fine resolution must be simultaneously achieved. For example, the accuracy required in a device for making the master disk of a next generation DVD is expected to be 20 nm in a three-dimensional space of 50 X 50 X 50 mm. We have proposed a spatial in-parallel actuated mechanism with redundant active joints for gross and fine motions for simultaneously realizing a large working space and a fine resolution in applications mentioned above. Conditions and method of the kinematic synthesis of the mechanism has been clarified, and a kinematic synthesis has been carried out. Based on the synthesis result, we built an experimental positioning robot driven by AC servo actuators with ball screws for generating gross motion and by PZT actuators for generating fine motion. Its fine positioning characteristics and its working space have been experimentally investigated. As the results, the experimental positioning robot proposed in this research simultaneously realized a fine resolution (20nm) within a large working space (80mm). We also analyzed static characteristics of a rolling spherical bearing that is a key machine element of the in-parallel actuated positioning robot.

多自由度机构作为定位装置在许多应用中，必须同时获得大的工作空间和高的分辨率。例如，在下一代DVD的母盘制作设备中所需的精度在50 × 50 × 50 mm的三维空间中预计为20 nm。我们提出了一种具有冗余主动关节的空间并联驱动机构，用于同时实现大的工作空间和上述应用中的精细分辨率。阐明了机构运动综合的条件和方法，并进行了运动综合。基于综合结果，我们建立了一个实验定位机器人驱动的交流伺服驱动器与滚珠丝杠产生的粗运动和PZT驱动器产生的精细运动。实验研究了其精密定位特性和工作空间。结果表明，本研究中提出的实验定位机器人同时实现了大工作空间（80 mm）内的精细分辨率（20 nm）。分析了并联驱动定位机器人的关键部件--滚动球面轴承的静态特性。

项目成果

Yukio Takeda: "An In-Parallel Actuated Manipulator with Redundant Actuators for Gross and Fine Motions"IEEE Int.Conf.Robotics and Automation. (予定). (2003)

Yukio Takeda：“具有用于粗略和精细运动的冗余执行器的并行驱动机械手”IEEE Int.Conf.Robotics and Automation（计划）。

市川和樹: "転がり球面軸受の静負荷容量および静剛性"第7回日本IFToMM会議シンポジウム前刷集. 21-26 (2001)

Kazuki Ichikawa：“滚动球面轴承的静载荷能力和静刚度”第七届日本IFToMM会议研讨会预印本集21-26（2001）。

Yukio Takeda, Kazuki Ichikawa, Hiroaki Funabashi and Kazuya Hirose: "A Spatial Six-Dof Hybrid In-Parallel Actuated mechanism for Fine Positioning within a Large Working Space"Proceedings of the 1st Korea-Japan Conference on Positioning Technology. 141-146

Yukio Takeda、Kazuki Ichikawa、Hiroaki Funabashi 和 Kazuya Hirose：“用于大工作空间内精细定位的空间六自由度混合并行驱动机构”第一届韩日定位技术会议论文集。

武田行生: "転がり球面軸受の誤差解析"2001年度精密工学会秋季大会学術講演会講演論文集. 568 (2001)

武田幸男：《滚动球面轴承的误差分析》2001年日本精密工程学会秋季会议学术讲座论文集568（2001）。

武田行生, 市川和樹, 舟橋宏明, 廣瀬和也: "並列粗微動駆動形6自由度空間位置決め機構"2003年度精密工学会春季大会学術講演会講演論文集. 67. 431-474 (2003)

武田幸雄、市川一树、船桥弘明、广濑一也：《并行粗精动驱动型6自由度空间定位机构》2003年日本精密工程学会春季会议学术会议论文集67. 431-474（2003）。