Study of Surface Cleaning by Decomposed Water by Laser

点击翻译按钮获取中文摘要

This research focused on decomposed products from ultra pure water, and these products were applied for surface cleaning. Our purposes were, (l) Decomposed products by excimer laser irradiation to water, gas dissolving water and water vapor are measured by spectrometer. (2) Decomposed products were affected to metal and contaminants, and cleaned themResults were as follows : Water was decomposed by Excimer laser irradiation, and OH, O2+, H2O+, O2 were detected by spectrometer. These products were oxidate potassium permanganate and reduce potassium iodide. And these products could etch zinc in neutral water, and copper in acid water.These decomposed products were applied to clean the tapping oil in the drilled hole. Pure water filled into the blind hole (diameter : 8mm). ArF excimer laser was irradiated. Irradiation conditions were as follows : laser power 150 mJ, repetition rate 30Hz, and total pulse 18000. As results, tapping oil on the SUS 304 was cleaned around the focus point (5mm around).