Study of Surface Cleaning by Decomposed Water by Laser

激光分解水表面清洗的研究

• 批准号: 13450055
• 负责人: TOKURA Hitoshi
• 金额: $ 10.11万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13450055/
• 关键词: Laser; Cleaning; Radicals; Copper; Oxidation; Reduce

This research focused on decomposed products from ultra pure water, and these products were applied for surface cleaning. Our purposes were, (l) Decomposed products by excimer laser irradiation to water, gas dissolving water and water vapor are measured by spectrometer. (2) Decomposed products were affected to metal and contaminants, and cleaned themResults were as follows : Water was decomposed by Excimer laser irradiation, and OH, O2+, H2O+, O2 were detected by spectrometer. These products were oxidate potassium permanganate and reduce potassium iodide. And these products could etch zinc in neutral water, and copper in acid water.These decomposed products were applied to clean the tapping oil in the drilled hole. Pure water filled into the blind hole (diameter : 8mm). ArF excimer laser was irradiated. Irradiation conditions were as follows : laser power 150 mJ, repetition rate 30Hz, and total pulse 18000. As results, tapping oil on the SUS 304 was cleaned around the focus point (5mm around).

本研究以超纯水分解产物为研究对象，并将其应用于表面清洗。（1）用光谱仪测定了准分子激光辐照水、溶解水的气体和水蒸气的分解产物。(2)结果表明：准分子激光照射分解水，用分光光度计检测出OH、O2+、H2O+、O2。产物为高锰酸钾氧化产物和碘化钾还原产物。这些分解产物在中性水中可以腐蚀锌，在酸性水中可以腐蚀铜，这些分解产物用于清洁钻孔中的出油。将纯水注入盲孔（直径：8mm）。ArF准分子激光照射。辐照条件如下：激光功率150 mJ，重复频率30 Hz，总脉冲18000。结果，SUS 304上的攻丝油在焦点周围（5mm周围）被清洁。

项目成果

銀杏, 比田井, 戸倉: "水の分解生成物を使用したエキシマレーザ加工に関する研究"2002年度精密工学会春期大会学術講演論文集. 380-380 (2002)

Ginkgo、Hitai、Tokura：“利用水分解产物进行准分子激光加工的研究”2002 年日本精密工程学会春季会议论文集 380-380 (2002)。

比田井 洋史, 戸倉 和: "水の分解生成物を利用したレーザクリーニングに関する研究"2003年度精密工学会春期大会学術講演論文集. 390-390 (2003)

Hiroshi Hitai、Kazu Tokura：“利用水分解产物进行激光清洗的研究”2003 年日本精密工程学会春季会议记录 390-390 (2003)。

Hirofumi HIDAI, Hitoshi TOKURA: "Laser cleaning with the aid of water decomposition"Proc. of Jpn. Soc. For Precision Eng 2003 Spring meeting. 390 (2003)

Hirofumi HIDAI、Hitoshi TOKURA：“借助水分解进行激光清洁”Proc。

Miyabi GINNAN, Hirofumi HIDAI, Hitoshi TOKURA: "Excimer laser processing with the aid of water decomposition"Proc. of Jpn. Soc. For Precision Eng 2002 Spring meeting. 380 (2002)

Miyabi GINNAN、Hirofumi HIDAI、Hitoshi TOKURA：“借助水分解的准分子激光加工”Proc。