High-aspect-ratio clack-free processing of transparent materials by laser-backside irradiation

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We report on a permanent change in the physical properties inside glasses using a continuous-wave laser beam. Themethod is explained as follows: the absorption of the glass was enhanced by laser heating, and the heated spot moved as a result of thermal radiation and conduction. To trigger heating, an absorbent material was placed on the backside of a glass plate and irradiated through the glass. Etching of the modified zone formed cone shaped structures. The modified zone was bended and curved by changing the direction of the laser beam.