Study on Hydro-thermal Processing of Cubic Boron Nitride by Laser Beam Irradiation

当固体材料被激光束照射在水中时，它们被加热到高温，在固体材料和基本材料之间产生的更进一步的化学反应是从水中产生的。本研究的目标是利用这些反应来处理立方硼氮基或其他陶瓷材料：第一水和溶解气体的水，如甲烷、氢和氧，由ArF超激剂激光束、氩离子激光束和YAG激光束以及由光谱光度法测试的发光。As the results ArF excimer laser beam can excite water and radicals such as 02イイD1+イエD1， OH， H2， 02 and etc. are produced。“虽然其他激光束不能令人兴奋，但能加热固体材料。其次，大约60%的腔室被水填满，上部部分被甲烷填满。”在水中溶解甲烷的压力为350千帕。房间的上部部分的气体压力为100千便士 ... More a. a.然后，ArF刺激激光束被聚焦在水面以下。从某种意义上说，这部电影被存放在光束焦点区域的水中。从TEM图像中，直径约30纳米的小颗粒与网格中的每个其他颗粒相连，第三次Si 3 N4陶瓷被浸入水中，而ArF刺激剂激光束被辐射。也就是说，陶瓷从激光束上放置了1毫米，陶瓷助剂的颜色被激光束改变了。ArF Excimer激光束可以作为有意义的水，在另一只手上， Ar on激光束不能提供额外的水，但更容易使陶瓷材料过热。同样的Si 3 N4陶瓷被一种氩离子激光器在水和空气中辐射。在两个案件中，洞都是成形的，但随着成形的特征各不相同，一个在水中似乎被部分处理。这取决于水和热陶瓷之间的水-热反应。这也是预料到cBN在高温下发生反应的过程。cBN单晶体在水和水蒸汽环境中受到辐射。在这两个案件中，形状都很清楚，洞已经成形。在水蒸汽中的一个特别的例子显示了高水晶般的电子干扰。同样，水晶般的习惯也在洞里观察到。Less（低）

When solid materials are irradiated by laser beam in the presence of water, they are heated to high temperature, further chemical reaction between solid materials and radicals which are produced from water is expected. The aim of this research is to process cubic boron nitride or other ceramic materials by using these reactions.Firstly water and water which dissolving gases, such as methane, hydrogen and oxygen, were irradiated by an ArF excimer laser beam, an Ar ion laser beam and a YAG laser beam and the luminescences were examined by Spectrophotometry. As the results ArF excimer laser beam can excite water and radicals such as 02ィイD1+ィエD1, OH, H2, 02 and etc. are produced. While the other laser beams could not excite one but heat the solid material.Secondly approximately 60 volume percent of a chamber was filled with water and the upper part was filled with methane. The pressure of the methane dissolved in water was 350kPa. The gas pressure of the upper part of the chamber was 100kP … More a. Then ArF excimer laser beam was focused just below the water surface. Consequently, film was deposited on the water around the beam-focus area. From a TEM image, small particles of about 30nm in diameter are connected with each other in the mesh.Thirdly Si3N4 ceramics were immersed in water and ArF excimer laser beam was irradiated. Although the ceramics were placed 1mm away from the laser beam, the color of ceramics adjacent to the laser beam changed. ArF excimer laser beam can excite water as mentioned above, on the other hand, Ar ion laser beam can not excite water but rather heats the ceramic material. The same Si3N4 ceramics were irradiated by an Ar ion laser in both water and air. On both cases holes are formed, however the formed features are different each other and one processed in water seems to be partly etched. This depends on the hydro-thermal reaction between water and heated ceramics. It is also expected to process cBN which react with water at high temperature. cBN single crystal was irradiated in water and water vapor environments. In both cases very clear shaped holes were formed. In particular one in water vapor showed high crystallinity on electron diffraction. Also crystal habits were observed around the holes. Less