Development of a Machining Center for Micro-machining by Electrical Discharge Machining

在本研究中，我们的目的是开发一个加工中心，以实现表面改性与薄电极，快速形成的薄电极，微加工薄电极和测量与快速形成的探针。主要研究结果如下：1）刃口形状与放电条件研究了几种工作介质下，削尖电极刃口形状与放电条件之间的关系。利用分子动力学进行了工艺模拟。2）时间分辨成像法观察间隙。时间分辨成像法用于高速摄像机观察间隙现象。研究表明，放电结束后，熔融材料沿电极沿着运动，放电压力引起的横向振动对成形有影响。3）电火花微细加工中心研制了电火花微细加工中心。它由步进电机驱动的工作台和用于微调的压电扫描器组成。在该机床上用单次放电锐化的较薄电极进行了微细加工。采用步进电机和压电扫描器的双模式控制，实现了大范围的精密运动。

In this research, we aimed to develop a machining center in order to realize surface modification with a thin electrode, rapid forming of a thinner electrode, micro-machining by the thinner electrode and measurement with a probe made by rapid forming. The results obtained through this research are described as follows.1)Edge profile and discharge conditions.The relation between an edge profile of a sharpened electrode and discharge condition was investigated with discharge wave form under several kind of working fluid. Process simulation was performed with use of molecular dynamics.2) Gap observation by a time resolved imaging method.A time resolved imaging method was used for the observation of gap phenomena with a high speed camera. It is revealed that molten material moves along the electrode after discharge end and the lateral vibration owing to discharge pressure affects on the shape form.3)Electrical discharge micro machining center.An electrical discharge micro machining center was manufactured. It consists of a table driven by stepping motors and a piezoelectric scanner for fine adjustment. Micro-machining was carried out with a thinner electrode sharpened by single discharge on the machine. Dual mode control with stepping motors and piezoelectric scanner was used for getting fine motion and with wide range movement.