Development of a Machining Center for Micro-machining by Electrical Discharge Machining

在本研究中，我们的目标是开发一个加工中心，以实现用薄电极进行表面改性、用薄电极快速成形、用薄电极进行微加工和用快速成形的探针进行测量。本文的研究结果如下：1)边型及放电条件。利用几种工质下的放电波形，研究了锐化电极的边缘轮廓与放电条件的关系。利用分子动力学进行了过程模拟。2)时间分辨成像方法的间隙观测。采用时间分辨成像方法，利用高速相机对间隙现象进行了观测。结果表明，熔体在放电端后沿电极移动，放电压力引起的横向振动对电极形状有影响。3)电火花微加工中心。研制了一种电火花微加工中心。它由步进电机驱动的工作台和用于微调的压电扫描仪组成。采用单次放电锐化较细电极进行微加工。采用步进电机和压电扫描仪的双模控制，实现了精细运动和大范围运动。

In this research, we aimed to develop a machining center in order to realize surface modification with a thin electrode, rapid forming of a thinner electrode, micro-machining by the thinner electrode and measurement with a probe made by rapid forming. The results obtained through this research are described as follows.1)Edge profile and discharge conditions.The relation between an edge profile of a sharpened electrode and discharge condition was investigated with discharge wave form under several kind of working fluid. Process simulation was performed with use of molecular dynamics.2) Gap observation by a time resolved imaging method.A time resolved imaging method was used for the observation of gap phenomena with a high speed camera. It is revealed that molten material moves along the electrode after discharge end and the lateral vibration owing to discharge pressure affects on the shape form.3)Electrical discharge micro machining center.An electrical discharge micro machining center was manufactured. It consists of a table driven by stepping motors and a piezoelectric scanner for fine adjustment. Micro-machining was carried out with a thinner electrode sharpened by single discharge on the machine. Dual mode control with stepping motors and piezoelectric scanner was used for getting fine motion and with wide range movement.