Three Dimensional Imaging System by Slicing with a Tool Wire

在本研究中，我们开发了一种多功能送丝装置，用于电火花加工和表面磨料加工的复合加工。以进给丝为工具，在小反作用力下对扫描电子显微镜观察样品进行电火花加工，并在同一机床上进行磨削加工。由于不会从初始阶段取出工件，因此保证了加工精度。该机床在两个皮带轮的中心配备了一个可移动的导丝装置，可以进行钢丝研磨加工。通过使用导丝装置，可以在没有导线振动的情况下进行表面磨料加工。线材磨料加工导丝装置在电火花线切割加工过程中退出，用于在磨料加工过程中设定切割深度。可以忽略电极磨损的影响，因为总是提供新的焊丝，因此可以保证精度。利用电火花线切割对被观察材料进行五面加工后，用磨料加工去除表面形成的放电凹坑，通过重复堆焊，用能量色散X射线能谱(EDS)对试件的材料分布进行三维观察。对钨铜(W-Cu)和铸铁进行了磨面加工。探讨了用扫描电子显微镜对重复磨削工艺进行三维布料的可行性。

In this research, we developed a multi functional wire feeding device for combined machining of electrical discharge machining (EDM) and surface abrasive machining. By using a feeding wire as a tool, a sample for SEM observation can be shaped by EDM under small reaction force and can be finished by abrasive machining on the same machine. Machining accuracy is guaranteed since the work-piece is not removed from the initial stage. This machine equips a movable wire guide in the center of two pulleys which enables wire abrasive machining. By using the wire guide, surface abrasive machining can be performed without wire vibration. The wire guide for wire abrasive machining withdraws in the process of wire EDM and it is used to set the cut of depth when the abrasive machining is in process. The influence of the electrode wear can be disregarded because a new wire is always supplied, thus accuracy can be guaranteed. After five sides machining to the materials being observed was carried out by wire EDM, abrasive machining was used to remove the electrical discharge craters formed on the surface.Repetitive surfacing leads to 3 dimensional observation of materials distribution of a specimen by energy dispersion X-ray spectrometry (EDS). We applied abrasive surface machining to tungsten-copper (W-Cu) and cast iron. We discuss the feasibility of 3-D materials distribution by SEM through the repetitive grinding process.