Development of vacuum-ultraviolet photo-induced cleaning device by use of a rare-gas excimer lamp

稀有气体准分子灯真空紫外光致清洗装置的研制

• 批准号: 13555202
• 负责人: KUBODERA Shoichi
• 金额: $ 7.49万
• 依托单位: University of Miyazaki
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13555202/
• 关键词: Rare gas excimers; Vacuum ultraviolet; Photo-chemical process; Photo-induced cleaning; Optical field induced ionization; Vacuum ultraviolet lamp; Coherent vacuum ultraviolet emission; Surface alteration; 光化学反応; エキシマランプ; 表面反応; ドライプロセス; 光還元

Main objective of this research was the development of a photo-induced cleaning device by use of a vacuum ultraviolet (VUV) rare gas excimer lamp. I have made the following accomplishments during last three-year research term.[1]Development of high-power raregas excimer lamps : This is a heart of present research. By optimizing the electrode configuration and power supply of a rare gas excimer lamp device, I have obtained an output power density of more than 1 mW/cm^2 126 nm, which is a champion data at such a short wavelength emission source. I was also successful to simplify vacuum handling system for the device.[2]Super dry, process : By use of the device developed in [1], I was successful to make a photo-induced etching of an oxidized layer on a silicon wafer without using any reactive gases. This device was also useful to make photo-induced cleaning of metal-coated. optics and surface alteration of various polymers.[3]VUV F2 lamp : In addition to the Ar2* excimer lamp at 126 nm, I … More have studied an F2 lamp at 157 nm. In spite of reactive nature of the F2, stable long-term operation was made possible by optimizing gas handling and impurity analysis.[4]Dry process : To increase the etching process rate, I have used a reactive gas for the oxidized layer etching. By use of this gas, the rate increased more than one order of magnitude, which would give this method reality.[5]Development of coherent VIJY emission source : As described above, the photo-induced process by use of incoherent lamps is very effective, but inevitably slow. High-power VUV light source would increase the rate orders of magnitude. I have thus developed a high-power coherent 126 nm emission by use of electrons produced by optical field induced ionization process. I. observed a small-signal gain coefficient of 0.05/cm for the first time.[6]Production of a photo-induced cleaning device : Based on the above scientific and engineering knowledge, I have designed a compact photo-induced cleaning device. With a help of a venture company originated from University of Miyazaki (Nano Tech Photon Corp.), a design became a real device. Less

本研究的主要目的是利用真空紫外稀有气体准分子灯，发展一种光致清洗装置。在过去的三年研究期间，我取得了以下成就。[1]大功率稀有气体准分子灯的研制：这是目前研究的一个核心。通过优化稀有气体准分子灯器件的电极结构和电源，我获得了超过1 mW/cm^2 126 nm的输出功率密度，这是在这样的短波长发射源的冠军数据。我还成功地简化了设备的真空处理系统。[2]超干工艺：通过使用[1]中开发的设备，我成功地在不使用任何反应气体的情况下对硅晶片上的氧化层进行了光诱导蚀刻。该装置也可用于金属涂层的光致清洗。光学和各种聚合物的表面改性。[3]VUV F2灯：除了126 nm的Ar 2 * 准分子灯外， ...更多信息 研究了157 nm的F2灯。尽管F2具有反应性，但通过优化气体处理和杂质分析，可以实现稳定的长期运行。[4]干法：为了提高蚀刻工艺速率，我在氧化层蚀刻中使用了反应气体。通过使用这种气体，速率增加了一个数量级以上，这将使这种方法成为现实。[5]相干VIJY发射源的开发：如上所述，使用非相干灯的光诱导过程非常有效，但不可避免地缓慢。高功率的真空紫外光源会使速率提高几个数量级。因此，我开发了一个高功率的相干126 nm发射通过使用光场诱导电离过程中产生的电子。I.首次观测到小信号增益系数为0.05/cm。[6]光诱导清洁装置的生产：基于上述科学和工程知识，我设计了一种紧凑的光诱导清洁装置。在一家源自宫崎大学的风险公司（纳米技术光子公司）的帮助下，一个设计变成了一个真实的设备。少

项目成果

Masanori Kaku, Takeshi Higashiguchi, Shoichi Kubodera, Wataru Sasaki: "Observation of vacuum-ultraviolet Ar2* radiation gain at 126 nm produced by an ultrashort high-intensity laser pulse propagating in a hollow fiber"Opt. Lett.. vol. 28, no. 10. 804-806

Masanori Kaku、Takeshi Higashiguchi、Shoichi Kubodera、Wataru Sasaki：“观察超短高强度激光脉冲在中空光纤中传播产生的 126 nm 真空紫外 Ar2* 辐射增益”

Takeshi Ohtsubo, Makoto Takaura, Teppei Azuma, Takeshi Higashiguchi, Shoichi Kubodera, Wataru Sasaki: "Removal of oxygen atoms from a SiO2 surface by incoherent vacuum ultraviolet excimer irradiation"Applied Physics A. vol. 76. 139-141 (2003)

Takeshi Ohtsubo、Makoto Takaura、Teppei Azuma、Takeshi Higashiguchi、Shoichi Kubodera、Wataru Sasaki：“通过非相干真空紫外准分子照射从 SiO2 表面去除氧原子”应用物理 A. 卷。

Masanori Kaku, Takahiro Yamaura, Hidenori Kodama, Shoichi Kubodera, Wataru Sasaki: "Vacuum ultraviolet spectroscopic system using a laser-produced plasma"Proceedings of the Second Symposium on Advanced Photon Research (Kansai Establishment, Japan Atomic E

Masanori Kaku、Takahiro Yamaura、Hidenori Kodama、Shoichi Kubodera、Wataru Sasaki：“使用激光产生等离子体的真空紫外光谱系统”第二届高级光子研究研讨会论文集（关西机构、日本原子能研究中心）

Junji Kawanaka: "A 1.5-kW high peak power vacuum ultraviolet flash lamp using a pulsed silent-discharge of krypton gas"Applied Physics Letters. 79. 3752-3754 (2001)

Junji Kawanaka：“使用氪气脉冲无声放电的 1.5 kW 高峰值功率真空紫外线闪光灯”《应用物理快报》。

東 鉄平: "エキシマランプによるシリコンウェハのSiO_2膜の還元プロセス"レーザー学会第291回研究会報告. 01-48. 1-5 (2001)

Teppei Higashi：“使用准分子灯在硅晶片上还原 SiO_2 薄膜”日本激光学会第 291 次会议报告 01-48（2001 年）。