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Formation of Functional Materials coated with Laminated Thin-Film and Establishment of Procedure to Evaluate Integrity Incorporating Material Microstructure

覆有层压薄膜的功能材料的形成以及评估材料微观结构完整性的程序的建立

基本信息

批准号：
15560070
负责人：
HOSHIDE Toshihiko
金额：
$ 2.69万
依托单位：
KYOTO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2004
项目状态：
已结题

项目摘要

Functional materials coated with laminating films were produced by using an RF magnetron sputtering apparatus. In this study, ceramic material system of SiC/Al_2O_3 was selected as target material, and glass for electronic usage was as substrate. Two-layered film coating materials were generated under different sputtering conditions. The surface roughness and porosity were measured on the surface of two-layered films of SiC/Al_2O_3. As sputtering time became longer, the surface roughness was observed to be coarser. On the other hand, the porosity hardly depended on the sputtering condition, and its value was extremely low. Strength characteristics of materials coated with two-layered SiC/Al_2O_3 films were investigated. It was clarified that the strength in a lower strength region was improved in each coated material compared with the strength distribution of glass substrate. The strength in a higher strength region was, however, not improved so much. It was suggested that sputtering time gave great influence to a strength characteristic of coating materials ; i.e. longer sputtering time resulted in the decrease in the mechanical reliability which was associated with deteriorating homogeneity of coated films. Although a delamination phenomenon observed in SiC single coating film, such a delamination could be avoided by coating Al_2O_3 between glass substrate and SiC. In producing functional materials coated with laminating films, sputtering condition should be adopted so that sputtering time was reduced by considering conformity of substrate and coating materials. By selecting such a condition, strength characteristics of coated materials in service could be improved, and its integrity could be guaranteed. Furthermore, it was revealed that strength characteristics as index of integrity of coated materials could be evaluated by a measurement of the dynamic microhardness including substrate hardness.

利用射频磁控溅射装置制备了涂覆有层压膜的功能材料。本研究选用SiC/Al_2O_3陶瓷材料体系为靶材，电子用玻璃为衬底。在不同的溅射条件下生成双层膜涂层材料。测量了SiC/Al_2O_3双层膜的表面粗糙度和孔隙率。溅射时间越长，表面粗糙度越大。另一方面，孔隙率几乎不依赖于溅射条件，并且其值极低。研究了SiC/Al_2O_3双层膜复合材料的强度特性。与玻璃基板的强度分布相比，在每种涂覆材料中，较低强度区域中的强度得到改善。然而，在较高强度区域中的强度并没有提高太多。有人建议，溅射时间给了很大的影响，涂层材料的强度特性，即较长的溅射时间导致的机械可靠性的下降，这是与恶化的均匀性的涂层膜。在SiC单层涂层中，虽然观察到了分层现象，但通过在玻璃基体和SiC之间涂覆Al_2O_3，可以避免这种分层现象。在制备覆膜功能材料时，应根据基材与覆膜材料的一致性，选择合适的溅射条件，以缩短溅射时间。通过选择这样的条件，可以改善涂层材料在使用中的强度特性，并保证其完整性。此外，据透露，强度特性作为涂层材料的完整性的指标，可以通过测量的动态显微硬度，包括基板硬度进行评估。