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Integrity Assessment of High-Performance Thin-Film Coated Materials by Meso-mechanics

通过细观力学评估高性能薄膜涂层材料的完整性

基本信息

批准号：
18560078
负责人：
HOSHIDE Toshihiko
金额：
$ 2.32万
依托单位：
Kyoto University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2006
资助国家：
日本
起止时间：
2006 至 2007
项目状态：
已结题

项目摘要

he durability of coated materials with higher performances should be adequately evaluated prior to their applications. This work aims at the establishment of procedure to estimate the durability of such materials. In the present work, the borosilicate glass was coated with ceramic films by the radio-frequency (RF) magnetron sputtering method, and mechanical properties of coated glass materials were investigated. At first, mechanical properties of materials coated with single ceramic film, alumina (Al_2O_3), silicon carbide (SiC) or titan nitride (TiN) were investigated. It was found that the strength properties are improved by coating ceramic materials on glass. As for the strength properties, TiN coated glass is superior to Al_2O_3 and SiC coated ones, though it was suggested that the surface properties of TiN coated material should be improved in its application. A new procedure to estimate the strength of coated materials was proposed by incorporating relative hardness and roughness with sputtering time. The strength in experiments was well estimated by using the proposed procedure. The possibility of a two-layer coating using Al_2O_3-SiC was also examined as a processing for the improvement. The measurements of surface roughness and porosity of coating film revealed that relatively smooth and dense coating films were formed under the sputtering condition adopted in this work. Thicker film was found to be harder because of the avoidance of effect due to softer glass substrate. Higher RF output power resulted in harder film. The bending strength was reduced by longer time of sputtering as well as porosity of coating film. By comparison with glass materials coated with single ceramics and the glass substrate, it was clarified that the strength and hardness of coated glass materials were improved by two-layer coating.

具有较高性能的涂层材料的耐久性应在应用前进行充分评估。这项工作的目的是建立评估此类材料耐久性的程序。本工作采用射频磁控溅射方法在硼硅酸盐玻璃上沉积陶瓷薄膜，并研究了镀膜玻璃材料的力学性能。首先，研究了单层陶瓷膜、氧化铝(Al_2O_3)、碳化硅(SiC)或氮化钛(TiN)涂层材料的机械性能。研究发现，通过在玻璃上涂覆陶瓷材料可以提高强度性能。就强度性能而言，TiN镀膜玻璃优于Al_2O_3和SiC镀膜玻璃，但有人建议TiN镀膜材料在应用中应改善其表面性能。提出了一种通过结合相对硬度和粗糙度与溅射时间来估计涂层材料强度的新程序。通过使用所提出的程序可以很好地估计实验的强度。作为改进工艺，还研究了使用Al_2O_3-SiC的两层涂层的可能性。涂膜表面粗糙度和孔隙率的测量表明，在本工作采用的溅射条件下形成了相对光滑且致密的涂膜。发现较厚的薄膜较硬，因为可以避免较软的玻璃基板产生的影响。较高的射频输出功率会产生更硬的薄膜。较长的溅射时间以及涂膜的孔隙率降低了弯曲强度。通过与单层陶瓷镀膜玻璃材料和玻璃基板的比较，发现两层镀膜提高了镀膜玻璃材料的强度和硬度。