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Integrity Assessment of High-Performance Thin-Film Coated Materials by Meso-mechanics

通过细观力学评估高性能薄膜涂层材料的完整性

基本信息

批准号：
18560078
负责人：
HOSHIDE Toshihiko
金额：
$ 2.32万
依托单位：
Kyoto University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2006
资助国家：
日本
起止时间：
2006 至 2007
项目状态：
已结题

项目摘要

he durability of coated materials with higher performances should be adequately evaluated prior to their applications. This work aims at the establishment of procedure to estimate the durability of such materials. In the present work, the borosilicate glass was coated with ceramic films by the radio-frequency (RF) magnetron sputtering method, and mechanical properties of coated glass materials were investigated. At first, mechanical properties of materials coated with single ceramic film, alumina (Al_2O_3), silicon carbide (SiC) or titan nitride (TiN) were investigated. It was found that the strength properties are improved by coating ceramic materials on glass. As for the strength properties, TiN coated glass is superior to Al_2O_3 and SiC coated ones, though it was suggested that the surface properties of TiN coated material should be improved in its application. A new procedure to estimate the strength of coated materials was proposed by incorporating relative hardness and roughness with sputtering time. The strength in experiments was well estimated by using the proposed procedure. The possibility of a two-layer coating using Al_2O_3-SiC was also examined as a processing for the improvement. The measurements of surface roughness and porosity of coating film revealed that relatively smooth and dense coating films were formed under the sputtering condition adopted in this work. Thicker film was found to be harder because of the avoidance of effect due to softer glass substrate. Higher RF output power resulted in harder film. The bending strength was reduced by longer time of sputtering as well as porosity of coating film. By comparison with glass materials coated with single ceramics and the glass substrate, it was clarified that the strength and hardness of coated glass materials were improved by two-layer coating.

具有较高性能的涂层材料的耐久性应在其应用之前进行充分评估。这项工作的目的是建立程序来估计这些材料的耐久性。采用射频磁控溅射法在硼硅酸盐玻璃表面镀覆陶瓷薄膜，并对镀膜后玻璃材料的力学性能进行了研究。首先，研究了单层陶瓷膜、Al_2O_3、SiC和TiN膜对材料力学性能的影响。结果表明，在玻璃表面涂覆陶瓷材料可以提高玻璃的强度性能。在强度性能方面，TiN涂层玻璃上级Al_2O_3和SiC涂层玻璃，但在应用中应进一步提高TiN涂层材料的表面性能。提出了一种结合相对硬度和粗糙度与溅射时间的关系来估算涂层材料强度的新方法。实验结果表明，该方法能较好地估计出材料的强度。本文还探讨了采用Al_2O_3-SiC双层涂层作为改进工艺的可能性。对薄膜表面粗糙度和孔隙率的测量表明，在本工作所采用的溅射条件下，形成了相对光滑、致密的薄膜。发现较厚的膜较硬，因为避免了由于较软的玻璃基板的影响。较高的RF输出功率导致较硬的膜。抗弯强度随溅射时间的延长而降低，同时也随涂层孔隙率的增加而降低。通过与单一陶瓷涂层玻璃材料和玻璃基板的比较，阐明了两层涂层玻璃材料的强度和硬度得到了提高。