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Development of vacuum pump driven by thermo-molecular effect of a rarefied gas

稀薄气体热分子效应驱动真空泵的研制

基本信息

批准号：
15560139
负责人：
SUGIMOTO Hiroshi
金额：
$ 2.3万
依托单位：
Kyoto University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2005
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15560139/
关键词：
Gas Separation Vacuum Pump Thermal Transpiration Dry Pump Rarefied Gas Dynamics Membrane Separation Microchemistry Thermal Edge Flow 空気分離熱遷移流熱突端流 Knudsen Compressor 熱ほふく流マイクロチャンネル

项目摘要

In a rarefied gas, the temperature field of the gas plays an important role in inducing time-independent flows of the gas even if there is no external force. In this study we develop a new type of pump (thermo-molecular pumps) driven by these flows. The results are as follows :1.Thermal Edge Pump :In the preceding studies, the driving force of the thermo-molecular pumps was limited to the thermal transpiration flow, which is induced in a pipe or channel with a temperature gradient. In this study, the author devised a new type of pump driven by the thermal edge flow. It is a flow induced at the vicinity of a sharp edge of heated (cooled) body. The temperature gradient of the solid walls, which is necessary in the Knudsen compressor and causes energy loss of the pump, is not required in the new device. The performance of the new pump -thermal edge pump- was examined experimentally. Another result, which is obtained by numerical simulation, is that the design of thermal edge pumps has wide varieties. The thermal edge pump in the micro channel is promising as the pump which works at higher pressures (e.g.atmospheric pressure).2.Gas Separation Effect of Thermo-molecular Pumps :In the thermo-molecular pumps, the size of the mean free path is not negligible. In this situation, the velocity of the mixture of the gas depends on the spices of gas. Thus it may be possible that the mixture of the gas is separated in these pumps. By using the DSMC simulation of the rarefied mixture of gases, it is found that the thermal edge pump has fairly large separation effect.

在稀薄气体中，即使没有外力，气体的温度场在诱导气体的与时间无关的流动方面也起着重要的作用。在这项研究中，我们开发了一种新型的泵（热分子泵）驱动这些流动。主要研究结果如下：1.热边缘泵：在以往的研究中，热分子泵的驱动力仅限于在具有温度梯度的管道或通道中产生的热蒸腾流。本文设计了一种新型的热边缘流驱动泵。它是在加热（冷却）物体的尖锐边缘附近诱导的流动。固体壁的温度梯度，这是必要的，在努森压缩机和泵的能量损失，是不需要在新的设备。对这种新型泵浦--热边缘泵浦--的性能进行了实验研究。通过数值模拟得到的另一个结果是，热边缘泵的设计具有广泛的多样性。热分子泵的气体分离效应：在热分子泵中，平均自由程的大小是不可忽略的。在这种情况下，气体混合物的速度取决于气体的种类。因此，可以在这些泵中分离气体的混合物。通过对稀薄混合气体的DSMC模拟，发现热边缘泵浦具有较大的分离效果。