Spectroscopic Observation of Electron Energy Distribution Function of Plasmas in a State of Non-Equilibrium Based upon Collisional Radiative Model

本文讨论了在0.1 ~ 10 Torr的气压范围内，微波放电氩等离子体中电子能量分布函数（EEDF）对氩离子激发态数密度的影响。我们在实验上产生了微波放电氩等离子体，测得等离子体的电子温度和密度分别为5-12 eV和（1-4）×10^<11>cm^<-3>。单探针分析也表明其EEDF近似于Druyvesteynian，但具有较大的不确定性。我们用光谱学方法测量了Ar Ⅰ激发态的数密度。在数值分析中，我们用碰撞辐射模型代替实验观测到的电子温度和密度，得到了激发态的数密度。当采用Druyvesteyian分布作为EEDF时，用碰撞辐射模型计算的激发态数密度与实验值符合得很好，而Maxwell分布的计算结果较差。

We discuss the effects of electron energy distribution function (EEDF) on the number densities of excited states of Ar I in a microwave discharge argon plasma in the pressure range of 0.1 to 10 Torr. We experimentally generate the microwave discharge argon plasma and find the electron temperature and density to be 5-12 eV and (1-4)×10^<11> cm^<-3>, respectively. Single probe analysis also shows that its EEDF is approximately Druyvesteynian, but with a large uncertainty. We measure the number densities of excited states of Ar I by spectroscopic examination. For numerical analysis, we obtain the number densities of, the excited states by using a collisional radiative model, substituting experimentally observed electron temperature and density. The number densities of excited states calculated by the collisional radiative model agree well with the experimental ones when we adopt the Druyvesteynian distribution as EEDF, whilst the Maxwellian distribution gives poor results.