Spectroscopic Observation of Electron Energy Distribution Function of Plasmas in a State of Non-Equilibrium Based upon Collisional Radiative Model

基于碰撞辐射模型的非平衡态等离子体电子能量分布函数的光谱观测

• 批准号: 16540446
• 负责人: AKATSUKA Hiroshi
• 金额: $ 2.05万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2004
• 资助国家: 日本
• 起止时间: 2004 至 2005
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-16540446/
• 关键词: Microwave discharge; Electron Energy Distribution Function; Excited states density; Collisional Radiative model; Druyvesteyn distribution; bi-Maxwellian distribution; Atomic line spectra of noble gases; Non-linear simultaneous equations; 分光計測; 希ガ

We discuss the effects of electron energy distribution function (EEDF) on the number densities of excited states of Ar I in a microwave discharge argon plasma in the pressure range of 0.1 to 10 Torr. We experimentally generate the microwave discharge argon plasma and find the electron temperature and density to be 5-12 eV and (1-4)×10^<11> cm^<-3>, respectively. Single probe analysis also shows that its EEDF is approximately Druyvesteynian, but with a large uncertainty. We measure the number densities of excited states of Ar I by spectroscopic examination. For numerical analysis, we obtain the number densities of, the excited states by using a collisional radiative model, substituting experimentally observed electron temperature and density. The number densities of excited states calculated by the collisional radiative model agree well with the experimental ones when we adopt the Druyvesteynian distribution as EEDF, whilst the Maxwellian distribution gives poor results.

本文讨论了在0.1 ~ 10 Torr的气压范围内，微波放电氩等离子体中电子能量分布函数（EEDF）对氩离子激发态数密度的影响。我们在实验上产生了微波放电氩等离子体，测得等离子体的电子温度和密度分别为5-12 eV和（1-4）×10^<11>cm^<-3>。单探针分析也表明其EEDF近似于Druyvesteynian，但具有较大的不确定性。我们用光谱学方法测量了Ar Ⅰ激发态的数密度。在数值分析中，我们用碰撞辐射模型代替实验观测到的电子温度和密度，得到了激发态的数密度。当采用Druyvesteyian分布作为EEDF时，用碰撞辐射模型计算的激发态数密度与实验值符合得很好，而Maxwell分布的计算结果较差。

项目成果

Dependence of Gas Temperature of Oxygen Plasma on Discharge Conditions;

氧等离子体气体温度对放电条件的依赖性；

• 发表时间: 2005
• 期刊: J. Adv. Oxid. Technol., 8[1]
• 作者: K.Naoi;T.Sakamoto;H.Matsuura;H.Akatsuka
• 通讯作者: H.Akatsuka

Spectroscopic Study on Vibrational Nonequilibrium of a Microwave Discharge Nitrogen Plasma

• DOI: 10.1143/jjap.43.5550
• 发表时间: 2004-08
• 期刊: Japanese Journal of Applied Physics
• 影响因子: 1.5
• 作者: S. Koike;T. Sakamoto;H. Kobori;H. Matsuura;H. Akatsuka

Experimental Study of Effect of Rare Gas Admixture on Temperatures of Microwave-Excited Oxygen Discharge Plasma

稀有气体混合物对微波激发氧气放电等离子体温度影响的实验研究

• 发表时间: 2006
• 期刊: Jpn.J.Appl.Phys. 45,[1A]
• 作者: T.Sakamoto;K.Naoi;H.Matsuura;H.Akatsuka
• 通讯作者: H.Akatsuka

Plasma Diagnostics in Plasma Processing for Nanotechnology and Nano-level Chemistry

纳米技术和纳米级化学等离子体处理中的等离子体诊断

• 发表时间: 2004
• 期刊: Sci. Technol. Adv. Mater., 5
• 作者: S.Koike;T.Sakamoto;H.Kobori;H.Matsuura;H.Akatsuka;H.Akatsuka
• 通讯作者: H.Akatsuka

Experimental Study of Effect of Rare Gas Admixture on Temperatures of Microwave-Excited Oxygen Discharge Plasma;

稀有气体混合物对微波激发氧气放电等离子体温度影响的实验研究

• 发表时间: 2006
• 期刊: Jpn. J. Appl. Phys., 45[1A]
• 作者: T.Sakamoto;K.Naoi;H.Matsuura;H.Akatsuka
• 通讯作者: H.Akatsuka