A Fundamental Study on Optical Emission Spectroscopy Measurement of Atmospheric Pressure Discharge Plasmas

大气压放电等离子体发射光谱测量基础研究

• 批准号: 18540485
• 负责人: AKATSUKA Hiroshi
• 金额: $ 2.49万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2006
• 资助国家: 日本
• 起止时间: 2006 至 2007
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18540485/
• 关键词: atmospheric pressure plasma; optical emission spectroscopy; collisional radiative model; collisional relaxation; excitation temperature; atomic collision; excited states population; collision frequency; 衝突幅射モデル; アルゴンプラズマ; 電子温度測定; マイクロ波放電; 励起状態

We studied a method to estimate electron temperature of atmospheric pressure argon plasma, based upon the population distribution of the excited populations of argon atoms in the plasma. Numerical calculations show that the excitation temperature determined by population of 4p and 5p levels is found to be a function of the electron temperature as well as the gas temperature, while its dependence on the electron density is rather weak when the electron density is less than 1012 cm-3, where the collision frequency of neutral ground atoms with the excited states is larger than that with electrons. We found that the two temperatures Te and Tg are both essential, and the ratio of excited state population is almost independent of the electron density. If we determine the approximate gas temperature by other methods like OES measurement of rotation temperature, we can fix the gas temperature in the CR model. Consequently, the excitation temperature is uniquely correlated with the electron temperature. We demonstrate experimental OES measurement of argon plasma at atmospheric pressure excited by 2.45 GHz microwave with its power 150 W and find the electron temperature about (0.9±0.1) eV.

我们研究了一种基于等离子体中Ar原子激发态布居分布来估算大气压Ar等离子体电子温度的方法。数值计算表明，由4P和5P能级布居决定的激发温度是电子温度和气体温度的函数，而当电子密度小于1012 cm-3时，中性基原子与激发态的碰撞频率大于与电子的碰撞频率，其对电子密度的依赖性较弱。我们发现Te和Tg这两个温度都是必需的，激发态布居比几乎与电子密度无关。如果用OES测量旋转温度等其他方法来确定近似气体温度，则可以将气体温度固定在CR模型中。因此，激发温度与电子温度是唯一相关的。我们用2.45 GHz功率150W的微波对大气压下的Ar等离子体进行了OES实验测量，测得电子温度约为(0.9±0.1)eV。

项目成果

大気圧非平衡マイクロ波プラズマジェットの発光分光計測と表面改質プロセスの相関

大气压非平衡微波等离子体射流的发射光谱测量与表面改性过程之间的相关性

• 发表时间: 2006
• 期刊: プラズマ応用科学 14
• 作者: 湯地敏史;藤岡万也;藤井修逸;福山紅陽;赤塚洋
• 通讯作者: 赤塚洋

Acceleration of a Cold Argon Arc Jet Plasma Flowing along Open-Field-Line

沿明场线流动的冷氩弧喷射等离子体的加速

• 发表时间: 2007
• 作者: H. Ichii;Y. Yoshida;Y. Nagahara;H. Matsuura and H. Akatsuka
• 通讯作者: H. Matsuura and H. Akatsuka

Estimation of Electron Temperature of Non-Equilibrium Argon Plasma of Atmospheric Pressure by OES Measurement

利用 OES 测量估算大气压非平衡氩等离子体的电子温度

• 发表时间: 2007
• 作者: H. Akatsuka;T. Yuji;T. Urayama;R. Raju and S. Fujii
• 通讯作者: R. Raju and S. Fujii

Experimental Study of Temperatures of Atmospheric-Pressure Nonequilibrium Ar/N2 Plasma Jets andPoly (ethylene terephtalate)-Surface Processing

大气压非平衡Ar/N2等离子射流温度及聚对苯二甲酸乙二醇酯表面处理的实验研究

• 发表时间: 2007
• 期刊: Jpn. J. Appl. Phys 46 [2]
• 作者: T.;Yuji;Y.;Suzaki;T.;Yamawaki;H.;Sakaue;H.;Akatsuka
• 通讯作者: Akatsuka

実験室酸素窒素プラズマの電子エネルギー・振動励起の非平衡性

实验室氧氮等离子体中电子能量的不平衡与振动激发

• 发表时间: 2007
• 作者: 湯地敏史;藤岡万也;藤井修逸;福山紅陽;赤塚洋;赤塚洋
• 通讯作者: 赤塚洋