Kinetics and spectroscopy of fluorine-silicon compounds

氟硅化合物的动力学和光谱

• 批准号: 495852613
• 负责人: Professor Dr. Jürgen Troe
• 金额: --
• 依托单位: Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2022
• 资助国家: 德国
• 起止时间: 2021-12-31 至 2022-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/495852613?language=en
• 关键词: Kinetics; spectroscopy; fluorine; silicon; compounds

This project studies the thermal dissociation of simple silicon-fluorine compounds by employing the shock wave method. Theoretical modeling accompanies the experiments. The considered reactions are of relevance for practical applications such as plasma-etching in microelectronics or thin-film deposition of silicon. In spite of this, kinetic and spectroscopic data are known only to a limited extent. First experiments in this project showed evidence for unusual autocatalytic mechanisms which may also play some role in fluorocarbon chemistry.

本计画利用冲击波方法研究简单硅氟化合物的热分解。理论建模伴随着实验。所考虑的反应是相关的实际应用，如微电子或薄膜沉积硅等离子体蚀刻。尽管如此，动力学和光谱数据仅在有限程度上已知。该项目的第一个实验显示了不寻常的自催化机制的证据，这些机制也可能在氟碳化合物化学中发挥一定作用。