Variation of irregular structures in MEMS Arrays for minimizing interaction phenomena with light (View)

数以百万计的MEMS微镜阵列能够通过静电驱动调制和引导光。光波穿过相同方向的周期性微结构阵列，例如在窗户或建筑物的玻璃立面上，会导致光衍射和鬼影，这可能会干扰透过窗户的清晰视野。应该通过尽可能不规则的结构来获得明显的改进，就其单独的形状，大小和方向而言。自由形式，不同的仰角和铰链方向将被应用。此外，还将研究耐紫外线性和颜色中性。在上述细节上不同的各种阵列将被模拟、设计、技术实现和实验表征。

Arrays with millions of MEMS micromirrors enable to modulate and guide light via electrostatic actuation. Light waves passing through arrays of periodic microstructures of identical orientation, e.g. in windows or glass facades of buildings, lead to light diffraction and ghost images, which might disturb the clear view through the window. A distinct improvement should be obtained via structures which are as irregular as possible, regarding their individual shape, size and orientation. Freeforms, different elevation angles and hinge orientations will be applied. In addition, the UV resistance and color neutrality will be investigated. Various arrays differing in the above-mentioned details will be simulated, designed, implemented technologically and characterized experimentally.