Variation of irregular structures in MEMS Arrays for minimizing interaction phenomena with light (View)

MEMS 阵列中不规则结构的变化可最大限度地减少与光的相互作用现象（视图）

• 批准号: 509885786
• 负责人: Professor Dr. Hartmut Hillmer
• 金额: --
• 依托单位: Institut für Nanostrukturtechnologie und Analytik (INA)
• 依托单位国家: 德国
• 项目类别: Research Grants
• 资助国家: 德国
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/509885786?language=en
• 关键词: Variation; irregular; structures; MEMS; Arrays

Arrays with millions of MEMS micromirrors enable to modulate and guide light via electrostatic actuation. Light waves passing through arrays of periodic microstructures of identical orientation, e.g. in windows or glass facades of buildings, lead to light diffraction and ghost images, which might disturb the clear view through the window. A distinct improvement should be obtained via structures which are as irregular as possible, regarding their individual shape, size and orientation. Freeforms, different elevation angles and hinge orientations will be applied. In addition, the UV resistance and color neutrality will be investigated. Various arrays differing in the above-mentioned details will be simulated, designed, implemented technologically and characterized experimentally.

具有数百万个MEMS微镜的阵列能够通过静电致动来调制和引导光。光波穿过具有相同取向的周期性微结构的阵列，例如在建筑物的窗户或玻璃立面中，导致光衍射和重影，这可能干扰通过窗户的清晰视野。通过尽可能不规则的结构，就其各自的形状、尺寸和取向而言，应该获得明显的改进。自由形式，不同的仰角和铰链方向将被应用。此外，将研究抗紫外线性和颜色中性。将模拟、设计、技术上实施和实验上表征在上述细节上不同的各种阵列。