Subfield adressing of ringshaped MEMS shutter arrays with polygonal structures

具有多边形结构的环形MEMS快门阵列的子场寻址

• 批准号: 469360309
• 负责人: Professor Dr. Hartmut Hillmer
• 金额: --
• 依托单位: Institut für Nanostrukturtechnologie und Analytik (INA)
• 依托单位国家: 德国
• 项目类别: Research Grants
• 资助国家: 德国
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/469360309?language=en
• 关键词: Subfield; adressing; ringshaped; MEMS; shutter

Optical or interference-based microscopy requires illumination scenario which are spatially variable. However, not all requirements can be fulfilled at the same time such as speed, temperature range, color neutrality or availability of various combinations of geometric patterns. MEMS shutter arrays enable dynamic light modulation by electrostatic actuation, fulfilling all these demands, simultaneously. Our investigation aims for a proof-of-concept of transmission-based MEMS modulators by simulating, designing tailored subfield addressing schemes, implementing arrays technologically and characterizing experimentally. This methodology development of the polygon-area-based MEMS shutter arrays should identify the limits with respect to speed, extreme temperatures, user acceptance and number of subfield combinations and user acceptance.The single shutters will have triangular or pentagonal shape. The sequence of all straight hinges line up to a polygon. Several of these shutter rings comprise a subfield ring, which is subdivided into four quadrants. The quadrants are the subfields, which are addressable individually. The project aims for specific shapes of the subfields, which are defined by the area where the upper and lower electrodes overlap. The shapes are oriented to the future requirements of interference microscopy. However, the proof-of-concept should always stay aligned to other applications, from a scientific point of view.

光学或基于干涉的显微镜需要空间可变的照明场景。然而，并不是所有的要求都能同时满足，例如速度、温度范围、颜色中性或各种几何图案组合的可用性。MEMS快门阵列通过静电驱动实现动态光调制，同时满足所有这些要求。我们的研究旨在通过模拟、设计定制的子场寻址方案、技术实现阵列和实验表征来验证基于传输的MEMS调制器的概念。这种基于多边形区域的MEMS快门阵列的方法开发应该确定关于速度、极端温度、用户接受程度、子场组合数量和用户接受程度的限制。单个快门将具有三角形或五边形形状。所有直铰的序列排列成一个多边形。这些快门环中的几个包括一个子场环，子场环被细分为四个象限。象限是可单独寻址的子字段。该项目旨在确定特定形状的子场，这些子场由上下电极重叠的区域确定。这些形状是为了满足干涉显微镜的未来需求。然而，从科学的角度来看，概念验证应该始终与其他应用保持一致。