Microscope for quantitative 3-D characterization of nano- and microstructured surfaces

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The applied device shall serve to determine structures and surface profiles over large areas with high spatial resolution in a non-destructive manner. The combination of three complementing methods: laser scanning, focus variation and white light interferometry serves to provide precise structure analyses in the wide range from nanometers to millimeter. Images obtained can be analyzed quantitatively. The range of structures that can be analyzed precisely and without distortions includes also structures with high aspect ratios. The measurement itself does not include a strong interaction between probe and material. Moreover, the method does not require specific or even destructive sample preparation steps and can be carried out under ambient conditions in air. Due to this combination of capabilities and conditions, a wide range of research within the department of physics of the University of Muenster and within the faculty of natural sciences shall profit from this measurement method that is currently not available.Examples for applications from the work of the applying groups comprise the quantitative geometrical analysis of sputter craters in metallic, semiconducting or ceramic materials for diffusion analyses or process control measurements for the multi-step lithographic structuring of optical and photonic circuits, to list a few selected examples. Due to these applications, it is imperative that the device shall be situated in direct spatial context with the lithography devices inside the clean room. Specifically, for structures consisting of materials with high sensitivity against radiation damage by accelerated electrons as incurring during electron microscopy characterization, the device would allow determining the structural aspects at different steps of the lithographic process with enhanced precision, no damage and reduced processing time. For these reasons, the applied device would substantially extend the available capabilities for quantitative structure analyses of 3-dimensional structures within the faculty of natural science at the University of Münster and it would be available for the broad range of users within the Münster Nanofabrication Facility.