Functional Design of Semiconductin Thin Films Prepared by Modulation Sputtering Method and Its Application to Chemical Sensor for Odor and Taste

调制溅射法制备半导体薄膜的功能设计及其在气味和味道化学传感器中的应用

• 批准号: 09450041
• 负责人: NANTO Hidehito
• 金额: $ 6.59万
• 依托单位: Kanazawa Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09450041/
• 关键词: Intelligent sensor; Sputtering method; Thin films; Chemical sensor; Gas sensor; Oxide semiconductors; インテリジェント センサ

In order to develop an intelligent chemical sensor for odor and taste, we prepared semiconducting thin films and polymer films using modulation sputtering method, evaporation method, dipping method, spin coated method and plasma-polymerization method. Using these functional thin films, we prepared the chemical sensors such as the odor and taste. The following results were obtained ;It was found that the gas sensors using ZnO and ZnO-SiOィイD22ィエD2 thin film are useful for freshness detection of beverages and fishes.(1) It was found that the modulation magnetron sputtering method is useful for preparation of the semiconducting thin films as the molecular recognition film for the chemical sensors which can detect the "kansi".(2) We developed the method for the functional design of the gas sensor using polymer-film coated quartz resonator for environmental monitoring.(3) It was found that the taste sensor utilizing surface plasmon resonance(SPR) is useful for monitoring of the fermentation process of Japanese sake.

为了开发气味和味道的智能化学传感器，我们采用调制溅射法、蒸发法、浸渍法、旋涂法和等离子体聚合法制备了半导体薄膜和聚合物薄膜。利用这些功能性薄膜，我们制备了气味和味道等化学传感器。获得以下结果;发现使用ZnO和ZnO-SiOiiD22ィエD2薄膜的气体传感器可用于饮料和鱼类的新鲜度检测。(1)发现调制磁控溅射方法可用于制备半导体薄膜作为可检测“kansi”的化学传感器的分子识别薄膜。(2)我们开发了功能性传感器的方法。 设计了用于环境监测的采用聚合物薄膜涂覆的石英谐振器的气体传感器。(3)发现利用表面等离子体共振(SPR)的味道传感器可用于监测日本清酒的发酵过程。

项目成果

H. Nanto et al: "Novel Gas Sensor Using Polymer-film-coated Quartz Resonator for Environmental Sensing"Materials Science and Engineering C. (印刷中). (2000)

H. Nanto 等人：“使用聚合物薄膜涂层石英谐振器进行环境传感的新型气体传感器”材料科学与工程 C.（出版中）。

H.Nanto, E.Kusano, A.Kinbara et al.: "Smart Chemical Sensor Using ZnO Semiconducting Thin Films for Freshness Detection of Food and Beverages" Proceedings of SPIE. 3328(印刷中). (1998)

H.Nanto、E.Kusano、A.Kinbara 等人：“使用 ZnO 半导体薄膜进行食品和饮料新鲜度检测的智能化学传感器”SPIE 会议记录 3328（出版中）。

H.Nanto et al.: "Identification of Harmful Gases Using QCM Gas Sensors in Conjunction with Principal Component Analysis"Proceedings of the 3rd International Conference on Engineering Design and Automation. 313-320 (1999)

H.Nanto 等人：“使用 QCM 气体传感器结合主成分分析识别有害气体”第三届工程设计与自动化国际会议论文集。

H.Nanto et.al.: "Novel Gas Senson Using Polymer-film-coated Quantz Resonation for Envinonmental Sensing"Materials Science and Engineering C. 印刷中 (2000)

H.Nanto 等人：“Novel Gas Senson using Polymer-film-coated Quantz Resonation for Environmental Sensing”Materials Science and Engineering C. 出版 (2000)

近藤浩一, 南戸秀仁 他: "合成樹脂膜を塗布した水晶振動子式ニオイセンサによる酒の種類判別" 電気学会論文誌E. 117E・9. 443-448 (1997)

Koichi Kondo、Hidehito Minamito 等人：“使用涂有合成树脂膜的石英晶体气味传感器来区分酒的类型”IEEJ Transactions E. 117E·9 (1997)。