Functional Design of Semiconductin Thin Films Prepared by Modulation Sputtering Method and Its Application to Chemical Sensor for Odor and Taste

In order to develop一种智能化学sensor for odor and taste，we prepared semiconducting thin films and polymer films using modulation sputtering method，evaporation method, dipping methodspin coated method and plasma-polymerization method. Using these functional thin films，我们prepared the chemical sensors such as the odor and taste. the following results obtained；这是发现gas sensors using ZnO and ZnO- sio D22 thin film are useful for freshness(1)它发现了the modulation magnetron sputtering方法is useful for preparation of the semiconducting thin films as the molecular recognition film for the化学传感器可以检测“kansi”.(2)我们开发的方法用于功能设计of the gas sensor using polymer-film coated quartz resonator for环境monitoring.(3) Itwas found the taste sensor utilizing surface plasmon resonance(SPR) is useful for monitoring ofthe fermentation process of日本sake。

In order to develop an intelligent chemical sensor for odor and taste, we prepared semiconducting thin films and polymer films using modulation sputtering method, evaporation method, dipping method, spin coated method and plasma-polymerization method. Using these functional thin films, we prepared the chemical sensors such as the odor and taste. The following results were obtained ;It was found that the gas sensors using ZnO and ZnO-SiOィイD22ィエD2 thin film are useful for freshness detection of beverages and fishes.(1) It was found that the modulation magnetron sputtering method is useful for preparation of the semiconducting thin films as the molecular recognition film for the chemical sensors which can detect the "kansi".(2) We developed the method for the functional design of the gas sensor using polymer-film coated quartz resonator for environmental monitoring.(3) It was found that the taste sensor utilizing surface plasmon resonance(SPR) is useful for monitoring of the fermentation process of Japanese sake.