Functional Design of Plasma-Polymerized Organic Thin Films and Its Application to an Electronic Nose

为了开发一种新型的人工电子鼻系统，我们首先尝试了石英晶体微天平(QCM)传感器、表面等离子体共振(SPR)传感器和金属氧化物半导体(MOS)传感器等化学传感器的功能设计。然后，我们还尝试利用等离子体制备有机和无机材料的薄膜技术来制备这种化学传感器，作为电子鼻的传感膜。此外，我们还考察了组装的化学传感器的应用。研究结果表明：(1)QCM气味传感器对各种气体的响应强烈依赖于分子识别膜的官能团。这对于制备具有良好选择性的QCM气味传感器是非常重要的。(2)我们开发了一种独特的制备技术，它可以聚合有机薄膜作为QCM和SPR化学传感器的分子识别膜。(3)我们开发了一种新型的带有分子识别膜的SPR气味传感器，可以作为电子鼻系统的有用传感器之一。(4)研究发现，磁控溅射技术对于高灵敏度的MOS薄膜气体传感器和MOS气体传感器阵列的集成非常有用。(5)利用所开发的QCM，可以评价日本清酒和醋的质量。SPR和MOS化学传感器。为了开发能够表征混合气体和多种气味的化学成分的智能电子鼻系统，我们正在研究结合模式识别分析的QCM、SPR和MOS传感器。

In order to develop a novel artificial electronic nose (e-NOSE) system, first of all, we tried to do the functional design of chemical sensors such as quartz crystal microbalance (QCM) sensor, surface plasmon resonance (SPR) sensor and metal oxide semiconductor (MOS) sensor. Then, we also tried to prepare such chemical sensors based on the thin film fabrication technologies of organic and inorganic materials using plasma, which can use as sensing membrane of e-NOSE. Furthermore, we examined the application of fabricated chemical sensors. The following results are obtained :(1) It was found that the QCM odor sensor response for various gases strongly depended on the functional group of molecular recognition membrane. This is very important to prepare the QCM odor sensor with excellent selectivity.(2) We developed a unique fabrication technique using plasma chemical vapor deposition which can polymerize the organic thin film as molecular recognition membrane for QCM and SPR chemical sensors.(3) We developed a novel SPR odor sensor with molecular recognition membrane, which can use as one of useful sensor for e-Nose system.(4) It was found that the magnetron sputtering technique is very useful for MOS thin film gas sensors having high sensitivity for many gases and for integration of MOS gas sensor array.(5) It was found that quality of Japanese sake and vinegar can be estimated using developed QCM, SPR and MOS chemical sensors.In order to develop intelligent e-NOSE system which can characterize the chemical component of gas mixture and many kinds of smell we are now working on QCM, SPR and MOS sensor in conjunction with pattern recognition analysis.