权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

Development of Noncontact Mode Scanning Force/Tunneling Microscopy

非接触式扫描力/隧道显微镜的发展

基本信息

批准号：
09555005
负责人：
MORITA Seizo
金额：
$ 8.19万
依托单位：
Osaka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1998
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09555005/
关键词：
atomic force microscope atomic force scanning tunneling microscope tunneling current well-defined surface atomic resolution semiconductor surface AFM STM

项目摘要

Simultaneous measurement of atomic force and tunneling current will offer new opportunity to investigate the mechanical and electronic properties on the surface on an atomic scale. However, so far, simultaneous measurement of atomic force and tunneling current has not been achieved on atomic scale. This is due to the following three main reasons : (i) It is much difficult to measure weak attractive atomic force with a good signal-to-noise (SIN) ratio. (ii) It is much difficult to develop the clean and sharp conducting tip with atomic scale. (iii) It is much difficult to reduce the cross-talk between the atomic force and tunneling current.In this project, we constructed noncontact mode scanning atomic force/tunneling microscope (noncontact AFM/STM) to detect atomic force and tunneling current simultaneously on atomic scale. Atomic force measurement is based on frequency modulation (FM) detection method. The high sensitive atomic force measurement was realized by improving the displacement sensor and FM demodulator. Novel technique to fabricate the clean and sharp conducting Si cantilevers was developed, in which the argon ion sputtering method was used. Also, new technique to measure the atomic force and tunneling current without the cross-talk was developed, which is based on the frequency and time domain method. Measurement conditions for simultaneous measurement of atomic force and tunneling current were investigated theoretically and experimentally.

同时测量原子力和隧穿电流将为在原子尺度上研究表面的力学和电学性质提供新的机会。然而，到目前为止，还没有在原子尺度上实现原子力和隧穿电流的同时测量。这是由于以下三个主要原因：（i）很难测量具有良好信噪比（SIN）的弱吸引力。(ii)要研制出干净、锋利的原子级导电针尖是非常困难的。(iii)减少原子力和隧道电流之间的串扰非常困难，本项目构建了非接触式扫描原子力/隧道显微镜（非接触式原子力/隧道显微镜），用于在原子尺度上同时检测原子力和隧道电流。原子力的测量是基于调频（FM）检测方法。通过对位移传感器和调频解调器的改进，实现了高灵敏度的原子力测量。提出了一种用氩离子溅射法制备洁净、尖锐的导电硅薄膜的新工艺。同时，基于频域和时域方法，发展了一种无串扰测量原子力和隧穿电流的新技术。从理论和实验上研究了同时测量原子力和隧穿电流的测量条件。