Fatigue Characteristics of Silicon Micromechanism for Micromachine

微机械用硅微机构的疲劳特性

• 批准号: 09650117
• 负责人: TSUJI Hirokazu
• 金额: $ 0.77万
• 依托单位: Tokyo Denki University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09650117/
• 关键词: Micromachine; Micromechanism; Fatigue; Micromaterial; Fatigue test; Single-crystalline silicon; 疲労試験機

A fatigue-testing machine based on four-point bending was developed for micromaterials and micromechanisms. Cyclic loads were applied to a specimen by means of a piezo-electric actuator, which can control the displacement of the specimen with high resolution and frequency. Displacement of the specimen was measured by the optical interferometer combined with the computer image processing technique. A microscope and a CCD TV camera were used to obtain interference fringes, and the shutter of the camera was synchronized to the loading signal for the real-time processing of the cyclic displacement of the specimen. Basic tests were conducted with a smoothed specimen fabricated by dicing from a silicon wafer, and it was confirmed that the fatigue-testing machine satisfies the specifications needed. Two types of specimens were prepared to be used in the micromaterial fatigue testing, one was a notched type specimen and another was a smoothed film type one. These specimens were fabricated from silicon wafers by micromachining, such as PVD and the photo-etching process. In order to evaluate the key process of micromachining, the anisotropic etching process for a single silicon crystal was studied to determine the etching condition, so that the specimens with accurate geometry and dimensions could be performed.

研制了一种基于四点弯曲的微材料和微机构疲劳试验机。利用压电致动器对试件施加循环载荷，实现了对试件位移的高分辨率、高频率控制。采用光学干涉仪结合计算机图像处理技术测量试样的位移。利用显微镜和CCD电视摄像机获取干涉条纹，并将摄像机的快门与加载信号同步，实时处理试件的循环位移。用硅片切片加工的光滑试样进行了基本试验，证实了疲劳试验机满足所需的规格要求。制备了两种微材料疲劳试验试样，一种是缺口型试样，另一种是光滑膜型试样。这些样品是由硅片制成的，通过微加工，如PVD和光蚀刻工艺。为了评估微加工的关键工艺，对单晶的各向异性刻蚀工艺进行了研究，确定了刻蚀条件，从而实现了精确几何尺寸的样品加工。

项目成果

遠藤, 小森, 辻: "ピエゾアクチュエータを用いた微小材料試験機の開発" 日本機械学会関東支部ブロック合同講演会-'97桐生 講演論文集. 180-181 (1997)

Endo、Komori、Tsuji：“使用压电执行器开发微材料测试机”日本机械工程师学会关东分会联合讲座 - 97 Kiryu 讲座论文集 180-181 (1997)。

遠藤、小森、辻: "ピエゾアクチュエータを用いた微小材料試験機の開発" 日本機械学会関東支部ブロック合同講演会講演論文集. 180-181 (1997)

Endo、Komori 和 Tsuji：“使用压电执行器的微材料测试机的开发”日本机械工程师学会关东分会联合讲座会议记录 180-181（1997 年）。

遠藤, 小森, 辻: "ピエゾアクチュエータを用いた微小材料試験機の開発" 日本機械学会関東支部ブロック合同講演会講演論文集. 180-181 (1997)

Endo、Komori、Tsuji：“使用压电执行器的微材料测试机的开发”日本机械工程师学会关东分会联合讲座会议记录 180-181（1997 年）。