Fatigue Characteristics of Micromechanism Fabricated by Surface Micromachining

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Surface micromachining is applied to the fabrication of micro-specimens for the strength test of micromaterial. The surface micromachining is combined with the bulk micromaching conducted by the anisotropy etching of the single crystalline silicon. Static and fatigue strength are evaluated for the micro-specimens. Results are summarized as follows :1.A micromaterial testing machine is developed for four points bending under statically and cyclic loading. A Testing system and an algorithm for the computer to measure the specimen deformation and the load are improved.2.A thin film type of micro-specimen made of aluminum is fabricated by the surface micro-machining. The SEM observation suggested that the specimen needs some improvements in respect to the stress concentration, the residual stress in the film, and the accuracy for the patterning in the photo-etching processes.3.The Static strength of the single crystalline silicon manufactured by CZ and FZ method are compared each other by the IF method and the four-point bending test. The FZ silicon shows better performance for the bending test, while the CZ silicon shows higher value of the fracture toughness on the IF test.