Fatigue Characteristics of Silicon Micromechanism for Micromachine

微机械用硅微机构的疲劳特性

• 批准号: 11650100
• 负责人: TSUJI Hirokazu
• 金额: $ 1.41万
• 依托单位: Tokyo Denki University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1999
• 资助国家: 日本
• 起止时间: 1999 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-11650100/
• 关键词: Micromachine; Micromechanism; Fatigue; Micromaterial; Fatigue test; Single-crystalline silicon; Anisotropy etching

Elastic deformation of the microstructure such as an elasticity hinge was used for a movable mechanism of MEMS.The fabrication process of the microstructure often yielded the stress concentration. Static and fatigue strength are evaluated for notched type specimens fabricated from silicon wafers by micromachining, that is, PVD and the photo-etching processes. Results are summarized as follows :1. A micromaterial testing machine is developed for four points bending under statically and cyclic loading. An algorithm for the computer image processing to measure the specimen deformation is improved.2. Limitation between the loading frequency and deformation of the specimen is examined base on the energy law. Maximum frequency experimentally obtained under the fatigue test is half of the theory.3. An anisotropy etching has been applied to single crystalline silicon and V-groove is introduced. From the SEM observation a notch root has a radius of sub-micron order.4. It is found that the static strength of the notched specimen can be evaluated by the stress intensity factor, except for the extremely shallow notch.5. Fatigue test for 10^6 cycles is done for notched specimen, however no change is observed around the root of the notch.

将弹性铰链等微结构的弹性变形应用于微机电系统的可动机构。微观结构的制造过程往往产生应力集中。用微加工（PVD）和光蚀刻工艺对硅晶片制成的缺口型试样进行了静强度和疲劳强度评价。结果总结如下：1。研制了静、循环载荷下四点弯曲微材料试验机。改进了一种测量试件变形的计算机图像处理算法。基于能量定律分析了加载频率与试件变形之间的限制关系。疲劳试验得到的最大频率是理论的一半。介绍了单晶硅和v型槽的各向异性刻蚀。从扫描电镜观察，缺口根部的半径为亚微米级。结果表明，除极浅缺口外，缺口试件的静强度可用应力强度因子来计算。对有缺口的试样进行了10^6次的疲劳试验，但在缺口根部周围没有观察到变化。

项目成果

日野、小森、辻: "微小材料の強度評価用V溝切欠き試験片の製作"日本機械学会材料力学部門講演会講演論文集. No.99-16. 61-62 (1999)

Hino、Komori 和 Tsuji：“用于微小材料强度评估的 V 形槽缺口测试件的制作”日本机械工程学会材料力学分部论文集第 99-16 号（1999 年）。

S.Hino, K.Komori, H.Tsuji: "Fabrication of V-notched specimen for strength evaluation of micromaterial"JSME Proceedings. No.99-16. 61-62 (1999)

S.Hino、K.Komori、H.Tsuji：“用于微材料强度评估的 V 型缺口样品的制作”JSME 论文集。

S.Hino, Y.Ishikawa, H.Tsuji: "Evaluation for bending strength of notched micro-specimen made of silicon"JSME Proceedings. No.000-2. 233-234 (2000)

S.Hino、Y.Ishikawa、H.Tsuji：“硅制缺口微型样品的弯曲强度评估”JSME 论文集。

日野宗明,小森克敏,辻裕一: "微小材料の強度評価用V溝切欠き試験片の製作"日本機械学会材料力学部門講演会講演論文集. No.99-16. 61-62 (1999)

Muneaki Hino、Katsutoshi Komori、Yuichi Tsuji：“用于微观材料强度评估的 V 形槽缺口测试件的制作”日本机械工程学会材料力学分部论文集第 99-16 号（1999 年）。

日野宗明,石川洋祐,辻裕一: "切欠き付きシリコン微小試験片の曲げ強度の評価"日本機械学会関東支部ブロック合同講演会講演論文集. No.000-2. 233-234 (2000)

Muneaki Hino、Yosuke Ishikawa、Yuichi Tsuji：“带有缺口的硅微型试验样品的弯曲强度的评估”日本机械工程学会关东分会联合讲座会议记录第 000-234 号（2000 年）。