The Accuracy of Machine Tool Motion at Nanometer Level and Its Transfer Fidelity to Machined Surface
纳米级机床运动精度及其对加工表面的传递保真度
基本信息
- 批准号:60550092
- 负责人:
- 金额:$ 1.02万
- 依托单位:
- 依托单位国家:日本
- 项目类别:Grant-in-Aid for General Scientific Research (C)
- 财政年份:1985
- 资助国家:日本
- 起止时间:1985 至 1986
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
The purposes of this research are to develop a improved measuring method of the accuracy of motion of machine tool elements and also to analyse the transfer fidelity of the machine motion to the profile of machined surface.Based on an analysis of the so-called 3-points method, a new method is proposed for evaluating the radial runout of the rotor in an air spindle. The information on the true runout of the rotor can be obtained by this method without using the conventional reference sphere. With the aid of the newly developed reflective photo-electronic displacement sensor with subnanometer resolution and about 30 <mu> m working range, the runout of the air spindle is evaluated by the method proposed. The air spindle tested is shown to be operated within the rotational accuracy of about 50nm with the repeatability of less than 2nm.Furthermore, using the laser beam as a datum of straightness, the method is proposed for evaluating the accuracy of straight motion of machine tool elements … More with nanometer resolution. The principle of the method is high-sensitive detection of the displacement of the center of quadrunt photodiode which is fixed to the moving object and acts as a target of the laser beam. By employing the method proposed, the accuracy of straight motion on air slide and a specially designed elastic hinge subjected to forced deformation are measured and analysed. The accuracy of the straight motion of an air slide is successfully measured to be at the order of 0.1 <mu> m. In the short range of movement less than 100 <mu> m, the error motion of the elastic hinge is measured to be less than 1nm.Employing the machine elements as above, a series of cutting experiments was carried out and the surface profile is analysed. The form accuracy of the surface is observed to be less than 2nm in a specific crystal grain of brass when turned by a diamond tool. This results shows that the transfer fidelity of the machine motion to the machined surface is considered to be about 1nm. Less
为了改进机床零件运动精度的测量方法,分析机床运动到加工表面轮廓的传递保真度,在分析三点法的基础上,提出了一种评定空气主轴转子径向跳动的新方法。该方法可以在不使用常规参考球的情况下,获得转子的真实跳动信息。借助于新研制的反射式亚纳米分辨率光电位移传感器,利用该方法对空气主轴的跳动进行了测量。被测空气主轴的回转精度约为50 nm,重复性小于2 nm。此外,以激光光束为直线度基准,提出了评定机床元件…直线运动精度的方法更具纳米分辨率。该方法的原理是高灵敏度地检测固定在运动物体上的作为激光目标的四极管的中心位移。利用所提出的方法,对空气滑板和特殊设计的弹性铰链在强迫变形作用下的直线运动精度进行了测量和分析。成功地测量了气浮滑块的直线运动精度为0.1µm量级,在小于100µm的短运动范围内,测得弹性铰链的误差运动小于1 nm。观察到,用金刚石工具车削黄铜特定晶粒时,表面的形状精度小于2 nm。结果表明,机床运动到被加工表面的传递保真度约为1 nm。较少
项目成果
期刊论文数量(6)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
N.IKawa: Techol.Repts.Osaka Univ.36. 369-378 (1986)
N.IKawa:Techol.Repts.Osaka Univ.36。
- DOI:
- 发表时间:
- 期刊:
- 影响因子:0
- 作者:
- 通讯作者:
N.Ikawa, S.Shimada and H.Morooka: "Development of Reflective Photoelectronic Displacement Sensor with Subnanometer Resolution" Journal of the Japan Society of Precision Engineering.
N.Ikawa、S.Shimada 和 H.Morooka:“具有亚纳米级分辨率的反射式光电位移传感器的开发”日本精密工程学会杂志。
- DOI:
- 发表时间:
- 期刊:
- 影响因子:0
- 作者:
- 通讯作者:
N.Ikawa, S.Shimada, H.Morooka and H.Hirano: "Non-Reference Analysis of Rotational Accuracy with Nanometer Resolution on Ultraprecision Spindle" Technology Reports of the Osaka University. 36. 369-378 (1986)
N.Ikawa、S.Shimada、H.Morooka 和 H.Hirano:“超精密主轴上纳米分辨率旋转精度的非参考分析”大阪大学技术报告。
- DOI:
- 发表时间:
- 期刊:
- 影响因子:0
- 作者:
- 通讯作者:
N.Ikawa and S.Shimada: "Accuracy Problems in Ultra-Precision Metal Cutting" Journal of the Japan Society of Precision Engineering. 52. 2000-2004 (1986)
N.Ikawa 和 S.Shimada:《超精密金属切削中的精度问题》日本精密工程学会杂志。
- DOI:
- 发表时间:
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- 影响因子:0
- 作者:
- 通讯作者:
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Effect of anticancer drugs on 5-HT3 receptor subunits
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24659748 - 财政年份:2012
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Life extension of diamond cutting tool for ultraprecision machining of optical components
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19560129 - 财政年份:2007
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Research in polymorphisms in human taste receptor genes and taste disorder
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14370549 - 财政年份:2002
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Research in taste disorder and development of taste modulators
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12557143 - 财政年份:2000
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Mechanism of Strength Enhancement of Ceramics Superlattice Coating Films and Its Application to Design of Microstructure
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- 批准号:
12450059 - 财政年份:2000
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$ 1.02万 - 项目类别:
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Cloning and functional analysis of taste receptors for sourness and saltiness
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10480220 - 财政年份:1998
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$ 1.02万 - 项目类别:
Grant-in-Aid for Scientific Research (B).
Computer Aided Design of Microstructure for Highly Functional Ceramics Coating Films
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10450058 - 财政年份:1998
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Design of Highly Accurate Linear Carriage Guided by Laser Beam Straight Datum and Its Application for Profile Measurement and Machining
激光束直线基准引导高精度直线导轨设计及其在轮廓测量与加工中的应用
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09555045 - 财政年份:1997
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Grant-in-Aid for Scientific Research (B)
Effect of Cutting Speed on Cutting Phenomena and Its Limitation in High Sped Machining
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07455415 - 财政年份:1995
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$ 1.02万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
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