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High Dielectric Strength PlasmaーPolymerized Thin Films.

高介电强度等离子体聚合薄膜。

基本信息

批准号：
63550231
负责人：
MIYAIRI Keiichi
金额：
$ 1.41万
依托单位：
Shinshu University
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1988
资助国家：
日本
起止时间：
1988 至 1990
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-63550231/
关键词：
Thin film Plasma-Polymerization Electrical conduction Electrical breakdown Humidity Ambient effect 電界発光熱処理

项目摘要

The fabrication of plasmaーpolymerized thin films was made by introducing ethylene or trifluoromethane gas into a plasma in argon excited with 13.56MHz. PPE thin films were aged in the vacuum for one hour to avoid the oxidation. PPTFM thin films were not necessary to be aged. The chemical structure was investigated by FT-IR. FT-IR spectra show the existence of some C=0 or -C=C- bonds in PPE thin films. No oxidation was observed in PPTFM thin films manifest high dielectric strength of 8-10 MV/cm at room temperature which is higher than that of chemically polymerized organic films. However, the dielectric strength of PPE films decreases remarkably with humidity. PPTFM films are more stable against humidity than PPE films, though they show the lower dielectric strength than PPE films at dry a condition. Gold electrodes give a larger current in PPE thin films than aluminum electrodes, however, PPTFM thin films show no electrode dependence in the electrical conduction. Besides, the conductivity of PPTFM thin films is one or two orders of magnitude lower than that of PPE thin films. From the practical point of view, the influence of ambient gases on the electrical conduction was investigated. The conductivity of PPE thin films with aluminum electrodes shows about one order of magnitude larger than that measured in a vacuum or in nitrogen. In conclusion, PPE thin films are useful in vacuum because of high dielectric strength, however, films prepared from fluorine gas are desirable because of the chemical stability against oxidation when they are used under the ordinary atmospheric condition.

在13.56MHz频率的氩气激励下，向等离子体中通入乙烯或三氟甲烷气体，制备等离子体预聚薄膜。PPE薄膜在真空中老化1小时以避免氧化。PPTFM薄膜不需要老化。红外光谱表明薄膜中存在C=0或-C=C-键。PPTFM薄膜在室温下没有氧化现象，表现出较高的介电强度（8-10 MV/cm），高于化学聚合的有机薄膜。然而，PPE膜的介电强度随湿度显著降低。PPTFM膜比PPE膜对湿度更稳定，尽管它们在干燥条件下显示出比PPE膜低的介电强度。金电极在PPE薄膜中的电流比铝电极大，然而，PPTFM薄膜的导电没有电极依赖性。此外，PPTFM薄膜的电导率比PPE薄膜的电导率低一到两个数量级。从实用的角度出发，研究了环境气体对导电性能的影响。具有铝电极的PPE薄膜的电导率显示出比在真空或氮气中测量的电导率大约一个数量级。总之，PPE薄膜在真空中是有用的，因为高的介电强度，然而，由氟气制备的膜是理想的，因为当它们在普通大气条件下使用时，抗氧化的化学稳定性。